Wiring over substrate, semiconductor device, and methods for manufacturing thereof

ABSTRACT

A wiring over a substrate capable of reducing particles between wirings and a method for manufacturing the wiring is disclosed. A wiring over a substrate capable of preventing short-circuiting between wirings due to big difference in projection and depression between wirings and a method for manufacturing the wiring is also disclosed. Further, a wiring over a substrate capable of preventing cracks in the insulating layer due to stress at the edge of a wiring or particles and a method for manufacturing the wiring is also disclosed. According to the present invention, a method for manufacturing a wiring over a substrate is provided that comprises the steps of: forming a first conductive layer over an insulating surface; forming a first mask pattern over the first conductive layer; forming a second mask pattern by etching the first mask pattern under a first condition, simultaneously, forming a second conductive layer having a side having an angle of inclination cross-sectionally by etching the first conductive layer; and forming a third conductive layer and a third mask pattern by etching the second conductive layer and the second mask pattern under a second condition; wherein a selective ratio under the first condition of the first conductive layer to the first mask pattern is in a range of 0.25 to 4, and a selective ratio under the second condition of the second conductive layer to the second mask pattern is larger than that under the first condition.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method for manufacturing a wiringover a substrate and a semiconductor device having a multi-wirestructure.

2. Related Art

In recent years, a wiring over a substrate and a semiconductor deviceare highly integrated since the degree of integration of a semiconductorelement is improved. Accordingly, the width of a wiring is furtherminiaturized, and the number of wirings is increased. Moreover, an areaof the semiconductor device is reduced by being the wiring intomulti-wire.

However, there is a problem of disconnection or short-circuiting of thewiring due to particles such as contaminant particles since the spacebetween the wirings becomes narrowed due to the increase of the numberof wirings.

In the semiconductor device having a multi-wire structure, the width ofthe wiring is miniaturized and the density of the wiring is increased,which leads that a difference in projection and depression is increasedand the coverage of an insulating layer provided between wirings isdeteriorated. Therefore, there is another problem that a lower wiringand an upper wiring are short-circuited.

In the case of forming an insulating layer over the wiring by a coatingmethod, an insulating material is contracted and the stress isconcentrated at the edge of the wiring when baking the insulatingmaterial. As a result, cracks are produced in the insulating layer,which results in another problem. The cracks in the insulating layeryields problems that irregularities are produced over the surface of theinsulating layer; corrosion of the lower wiring due to penetration ofmoisture from the crack; and short-circuiting of the upper wiring andthe lower wiring at the crack.

Further, particles remained between wirings also cause cracks andirregularities over the surface of the insulating layer. In the case offorming a light-emitting element over the insulating layer, an anode anda cathode of the light-emitting element are short-circuited, which leadsto the deterioration of the light-emitting element.

When a crack is occurred in a certain portion of the insulating layer,cracks become readily occurred in another regions. That is, cracksbecome into a chain reaction. As a result, manufacturing yields of thewiring over a substrate and the semiconductor device are reduced.

SUMMARY OF THE INVENTION

In view of the foregoing, it is an object of the present invention toprovide a wiring over a substrate capable of reducing particles betweenwirings and a method for manufacturing the wiring over the substrate. Itis another object of the invention to provide a wiring over a substratecapable of preventing short-circuiting between wirings due to a bigdifference in projection and depression wirings and a method formanufacturing the wiring over the substrate. It is still another objectof the invention to provide a wiring over a substrate capable ofpreventing cracking in the insulating layer due to stress of the edge ofa wiring or particles and a method for manufacturing the wiring over thesubstrate. It is still another object of the invention to provide amethod for manufacturing a wiring over a substrate and a semiconductordevice having a multi-wire structure at high yields.

According to one aspect of the present invention, a first conductivelayer is formed over an insulating layer, a first mask pattern is formedover the first conducive layer, a second conductive layer is formed byetching the first conductive layer under a first condition, and a thirdconductive layer is formed by etching the second conductive layer undera second condition. In this instance, the first condition is thecondition that has a small selective ratio between the first maskpattern and the first conductive layer, whereas the second condition isthe condition that has a large selective ratio between the first maskpattern and the second conductive layer.

The present invention provides a method for manufacturing a wiring overa substrate comprising the steps of: forming a first conductive layerover an insulating surface; forming a first mask pattern over the firstconductive layer; forming a second mask pattern by etching the firstmask pattern under a first condition, simultaneously, forming a secondconductive layer having a side having an angle of inclinationcross-sectionally by etching the first conductive layer; and forming athird conductive layer and a third mask pattern by etching the secondconductive layer and the second mask pattern under a second condition.Moreover, the present invention provides a method for manufacturing asemiconductor device by forming an insulating layer after removing thethird mask pattern. Under the first condition, a selective ratio of thefirst conductive layer to the first mask pattern is in a range of 0.25to 4, and a selective ratio under the second condition of the firstconductive layer to the first mask pattern is larger than that under thefirst condition.

The present invention provides a method for manufacturing a wiring overa substrate comprising the steps of: forming a first conductive layerover an insulating surface; forming a first mask pattern over the firstconductive layer; forming a second mask pattern by etching the firstmask pattern under a first condition, simultaneously, forming a secondconductive layer having a side, a part of which has an angle ofinclination cross-sectionally by etching the first conductive layer;oxidizing a surface of the second conductive layer; and forming a thirdconductive layer and a third mask pattern by etching the secondconductive layer and the second mask pattern under a second condition.Moreover, the present invention provides a method for manufacturing asemiconductor device by forming an insulating layer after removing thethird mask pattern. Under the first condition, a selective ratio of thefirst conductive layer to the first mask pattern is in a range of 0.25to 4, and a selective ratio under the second condition of the firstconductive layer to the first mask pattern is larger than that under thefirst condition.

Further, the angle of inclination is in a range of 51° to 68°.

The present invention provides a method for manufacturing a wiring overa substrate comprising the steps of: forming a first conductive layerover an insulating surface; forming a first mask pattern over the firstconductive layer; forming a second conductive layer having a side havingan angle in a range of 85° to 90° cross-sectionally by etching the firstconductive layer under a first etching condition; and forming a thirdconductive layer and a second mask pattern by etching the secondconductive layer and the first mask pattern under a second condition.Moreover, the present invention provides a method for manufacturing asemiconductor device by forming an insulating layer after removing thesecond mask pattern. Under the second condition, a selective ratio ofthe first conductive layer to the first mask pattern is larger than thatunder the first condition.

The present invention provides a method for manufacturing a wiring overa substrate comprising the steps of: forming a first conductive layerover an insulating surface; forming a first mask pattern over the firstconductive layer; forming a second conductive layer having a side havingan angle in a range of 85 to 90° cross-sectionally by etching the firstconductive layer under a first etching condition; oxidizing a surface ofthe second conductive layer; and forming a third conductive layer and asecond mask pattern by etching the second conductive layer and the firstmask pattern under a second condition. Moreover, the present inventionprovides a method for manufacturing a semiconductor device by forming aninsulating layer after removing the second mask pattern. Under thesecond condition, a selective ratio of the first conductive layer to thefirst mask pattern is larger than that under the first condition.

Under the second condition, a mixed gas composed of an etching gas usedin the first condition and an etching gas that yields a higher selectiveratio of the first conductive layer to the first mask pattern than thatunder the first condition is used. In the case that the first conductivelayer is a conductive layer containing aluminum, the etching gas used inthe first condition is boron trichloride or chlorine, and the etchinggas that yields a higher selective ratio of the first conductive layerto the first mask pattern than that under the first condition is onekind or a plurality of kinds selected from the group consisting ofcarbon tetrafluoride, sulfur fluoride, and oxygen.The present invention provides a wiring over a substrate comprising: awiring formed over an insulating surface; wherein a side of the wiringhas a plurality of inclined planes with respect to the insulatingsurface, a first inclined plane and the insulating surface has an anglein a range of 50 to 70°, a second inclined plane and the insulatingsurface has an angle in a range of 20 to 60°, and the first inclinedplane is in contact with the insulating surface. A region formed bycrossing the first inclined plane and the second inclined plane is aside of a layer of the wiring.

The present invention provides a wiring over a substrate comprising: awiring formed over an insulating surface; wherein a side of the wiringhas a curved face.

The present invention provides a semiconductor device comprising: awiring formed over an insulating surface; and an insulating layer havinga step height reduction ratio over the wiring; wherein a side of thewiring has a plurality of inclined planes with respect to the insulatingsurface, a first inclined plane and the insulating surface has an anglein a range of 50 to 70°, a second inclined plane and the insulatingsurface has an angle in a range of 20 to 60°, and the first inclinedplane is in contact with the insulating surface. A region formed bycrossing the first inclined plane and the second inclined plane is aside of a layer of the wiring. The insulating layer having a step heightreduction ratio is formed by coating organic resin or siloxane polymer.

The present invention provides a semiconductor device comprising: awiring formed over an insulating surface; and an insulating layer havinga step height reduction ratio over the wiring; wherein a side of thewiring has a curved surface. The insulating layer having a step heightreduction ratio is formed by coating organic resin or siloxane polymer.

Since a wiring over a substrate according to the present invention has aside having a curved face or a plurality of inclined planes, particlesremained between wirings can be readily washed away when washing thesubstrate. Therefore, the density of particles of the wiring and thesemiconductor device can be reduced. Especially, the density ofparticles between wirings can be reduced, and so short-circuiting of thewiring and cracking of an upper insulating layer can be reduced.

In the semiconductor device having a multi-wire structure, since awiring has a side having a curved face or a plurality of inclinedplanes, a difference in projection and depression between wirings can bereduced and the coverage of an insulating layer formed betweenmulti-wire wirings can be improved. Therefore, short-circuiting betweena lower wiring and an upper wiring can be prevented. Further, stepheight reduction ratio of the insulating layer formed subsequent toforming the wiring can be improved.

Since a wiring has a side and an edge, each of which has a curved faceor a plurality of inclined planes, occurrence of stress at the edge ofthe insulating layer is reduced, and occurrence of cracks in theinsulating layer can be reduced. Therefore, corrosion of the lowerwiring due to penetration of moisture from the crack and a chainreaction of the cracks can be prevented. Moreover, manufacturing yieldsof the semiconductor device having a multi-wire structure are reduced.

These and other objects, features and advantages of the presentinvention will become more apparent upon reading of the followingdetailed description along with the accompanied drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a flow chart for showing a manufacturing process of a wiringover a substrate according to the present invention;

FIG. 2 is a flow chart for showing a manufacturing process of a wiringover a substrate according to the present invention;

FIGS. 3A to 3D are cross-sectional views for showing a manufacturingprocess of a wiring over a substrate according to the present invention;

FIGS. 4A to 4D are cross-sectional views for showing a manufacturingprocess of a wiring over a substrate according to the present invention;

FIGS. 5A to 5F are cross-sectional views for showing a manufacturingprocess of a wiring over a substrate according to the present invention;

FIGS. 6A to 6E are cross-sectional views for showing a manufacturingprocess of a wiring over a substrate according to the present invention;

FIG. 7 is a cross-sectional view for showing a shape of a wiring over asubstrate according to the present invention;

FIG. 8 is a cross-sectional view for showing a shape of a wiring over asubstrate according to the present invention;

FIGS. 9A and 9B are cross-sectional views for showing a shape of awiring over a substrate according to the present invention;

FIGS. 10A and 10B are cross-sectional views for showing a shape of awiring over a substrate according to the present invention;

FIGS. 11A and 11B are cross-sectional views for showing a shape of awiring over a substrate according to the present invention;

FIGS. 12A and 12B are cross-sectional views for showing a shape of awiring over a substrate according to the present invention;

FIGS. 13A and 13B are graphs for showing angles of inclined planes ofwirings over substrates according to the present invention;

FIGS. 14A and 14B are cross-sectional views for showing a manufacturingprocess of a semiconductor device according to the present invention;

FIGS. 15A and 15B are cross-sectional views for showing a manufacturingprocess of a semiconductor device according to the present invention;

FIG. 16 is a top view for showing a semiconductor device according tothe present invention;

FIGS. 17A to 17F are explanatory views of modes of light-emittingelements that can be applied to the present invention;

FIGS. 18A to 18F are views for showing equivalent circuits of pixelscapable of that can be applied to light-emitting display panelsaccording to the present invention;

FIGS. 19A and 19B are respectively a top view and a cross-sectional viewshowing a structure of a semiconductor device according to the presentinvention;

FIG. 20 is a block view for showing a structure of an electronic device;

FIG. 21 is an example of an electronic device;

FIGS. 22A and 22B are an example of an electronic device;

FIG. 23 is a cross-sectional view for showing an etching equipment thatcan be applied to the present invention; and

FIG. 24 is a cross-sectional view for showing a semiconductor deviceaccording to the present invention.

DESCRIPTION OF THE INVENTION Embodiment 1

In this embodiment, a method for manufacturing a wiring over a substratecomprising a wiring having a side with a curved face by an etchingprocess under a first condition and an etching process under a secondcondition is explained with reference to FIGS. 1, 3A to 3D, and 7.

As illustrated in FIG. 3A, a first insulating layer 101 is formed over asubstrate 100, and a first conductive layer 102 is formed over the firstinsulating layer 101. Then, a first mask pattern 103 is formed over thefirst conductive layer 102 (a step S101 in FIG. 1).

As the substrate 100, a substrate made from an insulating material suchas a glass substrate, a quartz substrate, or alumina substrate; aplastic substrate having heat resistance that can resist processingtemperature in a later process; a silicon wafer; a metal plate; or thelike can be used. In this instance, an insulating film for preventingdispersion of impurities from the substrate such as silicon oxide(SiOx), silicon nitride (SiNx), silicon oxynitride (SiOxNy) (x>y),silicon nitride oxide (SiNxOy) (x>y), or the like may be preferablyformed. Alternatively, a substrate that is a metal substrate such asstainless or a semiconductor substrate, each of which is covered by aninsulating film such as silicon oxide or silicon nitride, can be used.In the case that the substrate 100 is a glass substrate, a largesubstrate of 320×400 mm, 370×470 mm, 550×650 mm, 600×720 mm, 680×880 mm,1000×1200 mm, 1100×1250 mm, or 1150×1300 mm can be used.

In the case that a plastic substrate is used as the substrate 100,plastic having comparative high glass transition point such as PC (polycarbonate), PES (polyethylene sulfone), PET (polyethyleneterephthalate), or PEN (polyethylene naphthalate) is preferably used. Inthis instance, a glass substrate is used as the substrate 100.

The first insulating layer 101 is formed by a material having aninsulating property by a known method. Typically, an inorganicinsulating material or an organic insulating material is used.Specifically, an organic resin layer can be formed by coating and bakingpolyimide, polyamide, polyester, acrylic, or the like. Alternatively,SiO₂ having the bond of Si—CH₃ can be formed by coating PSG (phosphorusglass), BPSG (boron phosphorus glass), silicate SOG (Spin on Glass),polysilazane SOG, alkoxy silicate SOG, siloxane polymer, or the like bya droplet discharging, a coating method, or a printing method to bebaked. Silicon nitride, silicon nitride oxide, silicon oxide, or thelike can be formed by a PVD method (Physical Vapor Deposition), a CVDmethod (Chemical Vapor Deposition), a thermal oxide method. A metaloxide such as Ag, Cu, Ni, Pt, Pd, Ir, Rh, W, Al, Ta, Mo, Cd, Zn, Fe, Ti,Si, Ge, Zr, or Ba can be formed by a vapor deposition method, an anodeoxidization method, or the like. In this instance, a silicon oxide filmis formed by a CVD method.

The first conductive layer 102 can be formed by a droplet dischargingmethod, a printing method, an electroplating method, a PVD method(Physical Vapor Deposition method), a CVD method (Chemical VaporDeposition method), a vapor deposition method, or the like. As amaterial for the first conductive layer 102, metal such as Ag, Au, Cu,Ni, Pt, Pd, Ir, Rh, W. Al, Ta, Mo, Cd, Zn, Fe, Ti, Si, Ge, Zr, or Ba:alloys of the metal; or a metal nitride of the metal can be used.Alternatively, a conductive oxide material transparent to light,typically, indium tin oxide (ITO), zinc oxide (ZnO), zinc indium oxide(IZO), zinc oxide doped with gallium (GZO), indium tin oxide containingsilicon oxide, organic indium, organic tin, or the like can beappropriately used as the material for the first conductive layer 102.Further alternatively, aluminum containing nickel of 1 to 20% can beused. In this instance, the first conductive layer 102 is formed byaluminum by a sputtering method.

The first mask pattern 103 is preferably formed to have a side edge in atapered shape (hereinafter, taper portion). The angle of the taperpotion is 50 to 80°, preferably, 60 to 70°. The first mask patternhaving the taper portion allows that the second conductive layer formedafterwards to be formed into a shape having a taper portion. The firstmask pattern can be formed by a photolithography method, a dropletdischarging method, a printing method, or the like. In the case that thefirst mask pattern 103 is formed by a photolithography method, a reducedprojection exposure system (commonly known as a stepper) or mirrorprojection aligner (commonly known as an MPA) can be used as an exposuresystem. In the case that the reduced projection exposure system is used,a mask pattern may be formed to have a vertical side instead of atapered portion. In this case, the vertical side may be tapered by aheat treatment at 160 to 200° C. If a mask pattern having a tapered sidecan be formed, the present invention is not limited to the foregoingexposure systems, but a known exposure system can be freely used.

The side in a tapered shape has a shape having an angle of inclinationwith respect to the surface of the substrate.

As a material for the first mask pattern 103, organic resin such asacrylic resin, polyimide resin, melamine resin, polyester resin,polycarbonate resin, phenol resin, epoxy resin, polyacetal, polyether,polyurethane, polyamide (nylon), furan resin, diallyl phthalate resin,novolac resin, silicon resin can be appropriately used. In thisinstance, resist containing polyimide as its main component is used.

As illustrated in FIG. 3B, the first conductive layer 102 is etched byusing the first mask pattern 103 having a taper portion under a firstcondition to form a second conductive layer 111 having a taper portion(a step S102 in FIG. 1). The first condition is the condition that has asmall selective ratio of the first mask pattern 103 to the firstconductive layer 102. That is, the etching rate of the first maskpattern 103 is lower than that of the first conductive layer 102. Tosatisfy such the condition, a material that can etch both of the firstmask pattern and the first conductive layer 102 is preferably used as anetching gas. As a result, the second conductive layer having a taperportion can be formed by recessing the first mask pattern 103 and thefirst conductive layer 102. Since the first mask pattern 103 is recessedat this time, the width is slightly reduced and the thickness is alsoreduced. The mask pattern is referred to as a second mask pattern 112.In this instance, a chloride gas is used. As a typical example of thechloride gas, boron trichloride, chlorine, or the like can be used.

The condition that has a small selective ratio of the first mask pattern103 to the first conductive layer 102 is the condition that has aselective ratio of 0.25 to 4. Further, the selective ratio in thisinstance is a ratio of an etching rate of the first conductive layer 102to that of the first mask pattern 103.

As a method for etching, an ICP (Inductively Coupled Plasma) etchingmethod, an ECR (Electron Cyclotron Resonance) etching method, an RIE(Reactive Ion Etching) method, a CCP (Capacitively Coupled Plasma)etching method, an SWP (Surface Wave Plasma) etching method, or the likecan be appropriately used. In this instance, the ICP etching method isused.

Then, as illustrated in FIG. 3C, the second conductive layer 111 isetched under a second condition while leaving the second mask pattern112 to form a third conductive layer 131 having a curved surface (a stepS103 in FIG. 1). The second condition has larger selective ratio of thesecond mask pattern 112 to the second conductive layer 111 than that ofthe first condition. That is, the etching rate of the second maskpattern 112 is higher than that of the second conductive layer 111. Tosatisfy such the condition, a mixed gas composed of gas that can etch atleast the second conductive layer 111 and gas that can etch selectivelyonly the second mask pattern 112 is preferably used. As the etching gasa mixed gas with etching gas that can etch at least the secondconductive layer 111 and an etching gas used in the first condition canbe appropriately used. Further, as the etching gas that can etchselectively only the second mask pattern 112, carbon tetrafluoride,sulfur fluoride, oxygen, or the like can be nominated. In this instance,a mixed gas of boron trichloride and carbon tetrafluoride is used as theetching gas.

The term as used herein “selective ratio” refers to ratio between anetching rate of the second conductive layer 111 to an etching rate ofthe second mask pattern 112.

Further, it is preferable to apply bias power to produce self biasvoltage at high pressure and to increase ion impact energy. By recessingthe second mask pattern 112 by using gas that selectively etches thesecond mask pattern 112, a third mask pattern 121 is formed. Byrecessing the mask pattern, the upper edge of the second conductivelayer 111 is selectively etched by etching the exposed surface of thesecond conductive layer 111. As a result, a third conductive layer 131having a curved surface 132 can be formed. As the etching method, anyone of the etching methods nominated in the first condition can beappropriately used.

Further, the exposed region of the first insulating layer 101 is etchedand the thickness of the region is slightly reduced. Accordingly, asecond insulating layer 133 having difference in thickness is formed.

By removing the third mask pattern 121, the third conductive layer 131having a curved surface 132 can be formed. Further, in the case that theangle of inclination of the taper portion of the second mask pattern 112is further reduced, the upper edge of the third conductive layer 131 canbe formed to have a curved surface. The upper edge of the conductivelayer is a region 134 formed by crossing the top face and the side faceof the conductive layer, whereas the lower edge is a region 135 formedby crossing the bottom face and the side face of the conductive layer.

A cross section shape of the conductive layer formed according to thisembodiment is explained with reference to FIG. 7. The side face of theconductive layer 501 on an insulating layer 500 formed according to thisembodiment is curved as illustrated in FIG. 7. That is, the side facehas curved surfaces 502 and 503.

A wiring over a substrate having such the structure, particles arereadily washed away in a process of cleaning after etching treatment. Asa result, particles on the wiring and a semiconductor device can bereduced. Particularly, the density of the particle between wirings canbe reduced, and so short-circuiting of the wiring and cracking of anupper insulating layer can be reduced.

A difference in projection and depression between wirings can be reducedin a semiconductor device having a multi-wire structure, and so coverageof an insulating layer provided between the wirings can be improved andshort-circuiting between a lower layer wiring and an upper layer wiringcan be prevented. Moreover, in the case that the insulating layer isformed by a coating method over the upper layer of the wiring, the stepheight reduction ratio of the insulating layer can be improved, andphotolithography of a fine pattern over the insulating layer ispossible. As a result, the wiring can be formed into thin and fine,which can lead to high integration.

Embodiment 2

In this embodiment, a method for manufacturing a wiring having a sidewith a curved face according to a different etching condition from thatexplained in Embodiment 1 is explained with reference to FIGS. 1, 4A to4D, and 7.

As illustrated in FIG. 4A, as is the case with Embodiment 1, a firstinsulating layer 101 is formed over a substrate 100, and a firstconductive layer 102 is formed over the first insulating layer 101.Then, a first mask pattern 103 is formed over the first conductive layer102 (a step S101 in FIG. 1).

As illustrated in FIG. 4B, the first conductive layer 102 is etched byusing the first mask pattern 103 under a first condition to form asecond conductive layer 211 having a side perpendicular to the firstmask pattern 103 (a step S102 in FIG. 1). The first condition is thecondition by which the first conductive layer 102 is anisotropicallyetched, typically, a conductive layer having a perpendicular side isformed. Further typically, the first condition is the condition by whichonly the first conductive layer 102 is etched without recessing thefirst mask pattern 103. In the first condition in this embodiment, selfbias voltage is lower and pressure in a reaction chamber is slightlyhigher than those in the first condition described in Embodiment 1. As aresult, although the first mask pattern 103 has a taper portion, theside of the second conductive layer 211, which roughly corresponds tothe edge of the first mask pattern, and surface of the second conductivelayer 211 not overlapped with the first mask pattern are roughlyperpendicular to each other. Further, as the etching method, any one ofetching methods nominated in the first condition can be appropriatelyused.

The first condition in this instance is, specifically; the condition bywhich a conductive layer that has a projection portion having a side, apart of which has a right angle cross-sectionally is formed. Therefore,since self bias voltage is lower and pressure in a reaction chamber isslightly higher than those in the first condition described inEmbodiment 1, the first mask pattern 103 is not etched under the firstcondition in this embodiment.

The second conductive layer 211 has, specifically; a shape having aprojection portion having a side, a part of which has a right anglecross-sectionally. Further, the expression “projection portion having aside, a part of which has a right angle cross-sectionally” refers that apart of the cross-section of the side has an angle of inclination of 85°to 90° with respect to a surface of the substrate 100.

As illustrated in FIG. 4C, the second conductive layer 211 is etchedaccording to a second condition while leaving the first mask pattern 103to form a third conductive layer 231 having a curved surface 232 (a stepS103 in FIG. 1). The second condition is the same as that explained inEmbodiment 1. The second condition has a higher selective ratio of thefirst mask pattern 103 to the second conductive layer 211 than that inthe first condition. That is, an etching rate of the first mask pattern103 is higher than that of the second conductive layer 211. By etchingunder the second condition, the first mask pattern 103 is selectivelyetched to form a second mask pattern 221. By etching the surface of thesecond conductive layer 211 that is exposed by etching the first maskpattern, the upper edge of the second conductive layer is moreselectively etched than the lower edge of the second conductive layer.As a result, a third conductive layer 231 having a curved surface 232can be formed. As the etching method, any one of etching methodsnominated in the first condition can be appropriately used.

An exposed region of the first insulating layer 101 is etched, and thethickness of the first insulating layer 101 is slightly reduced.Accordingly, a second insulating layer 133 having difference in level isformed.

As illustrated in FIG. 4D, a wiring over a substrate provided with thethird conductive layer 231 having a curved surface 232 can be formed byremoving the second mask pattern 221. Also in this embodiment, the upperedge of the third conductive layer 231 can be formed to have a curvedsurface 232 by reducing the angle of inclination of the taper portion ofthe first mask pattern 103.

The cross-section shape of the conductive layer formed according to thisembodiment is, as is the case with Embodiment 1, a shape having curvedsurfaces 502 and 503 as illustrated in FIG. 7. A wiring having such thestructure and a semiconductor device having a multi-wire structure havean advantageous effect as is the case with Embodiment 1.

Embodiment 3

In this embodiment, a method for manufacturing a wiring having a sidehaving a plurality of inclined planes according to a different etchingprocess from that in Embodiments 1 and 2 is explained with reference toFIGS. 2, 5A to 5F, and 8.

As illustrated in FIG. 5A, a first insulating layer 101 is formed over asubstrate 100 as is the case with Embodiment 1, and a first conductivelayer 102 is formed over the first insulating layer 101. Then, a firstmask pattern 103 is formed over the first conductive layer 102 (a stepS101 in FIG. 2).

As illustrated in FIG. 5B, the first conductive layer 102 is etched byusing the first mask pattern 103 under a first condition to form asecond conductive layer 302 (a step S102 in FIG. 2). The first conditionis the condition by which the first conductive layer 102 is etched,therefore, a conductive layer having a tapered edge is formed. In thisinstance, the first condition in this example is the same as that inEmbodiment 1. Note that a second conductive layer 302 is formed byetching a part of the first conductive layer 102 in shorter time thanthat of the first etching process in Embodiment 1. At this time, thefirst mask pattern 103 is recessed, and so the width and the thicknessof the first mask pattern 103 are slightly reduced. Such the maskpattern is referred to as a second mask pattern 312. As an etchingmethod, any one of etching methods nominated in the first condition canbe appropriately used.

The first condition in this instance is, specifically; the condition bywhich a conductive layer that has a projection portion having a sidehaving cross-sectionally a tapered shape is formed. As a result, thesecond conductive layer 302 has the side, which roughly corresponds tothe edge of the first mask pattern, and the side and a part of a surfaceof the second conductive layer 302, which is not overlapped with thefirst mask pattern, are not perpendicular to each other. That is, thesecond conductive layer 302 has a projection portion having a side thatis not cross-sectionally perpendicular to the first mask pattern.

As illustrated in FIG. 5C, an oxide layer 303 is formed by oxidizing thesurface of the second conductive layer 302 (a step S111 in FIG. 2). As amethod for forming the oxide layer, a method of forming an oxide layerby washing the surface of the second conductive layer 302 with water orozone water; a method of forming an oxide layer by oxidizing the secondconductive layer 302 by exposing the substrate into the air; a method offorming an oxide by oxidizing the surface of the second conductive layer302 by heating at appropriate temperature; or the like can be used. Byusing the method of washing the surface of the second conductive layer302 with water or ozone water as the method for forming an oxide,particles over the substrate can be washed away.

As illustrated in FIG. 5D, a third conductive layer 311 having a taperededge is formed by etching the second conductive layer 302 by the firstetching condition. Since the oxide layer 303 is formed over the surfaceof the second conductive layer 302, higher bias power is preferablyapplied and higher self bias voltage is preferably produced in the firstcondition. As a result, the second conductive layer 302 can be etched inless time. Further, an oxide layer 303 is exposed in the directionperpendicular to the surface of the substrate 100, and so the oxidelayer 303 is also etched. In addition, the second mask pattern 312 isalso etched; accordingly, the width and the thickness of the second maskpattern 312 are slightly reduced. Such the mask pattern is referred toas a third mask pattern 313.

Since the cross-section of the projection portion of the secondconductive layer is formed into a tapered shape, the oxide layer 303 inthe taper portion is etched by an anisotropically etched.

As illustrated in FIG. 5E, a third conductive layer 311 is etched undera second condition while leaving the third mask pattern 313 to form afourth conductive layer 321 having different inclined planes 332 (a stepS103 in FIG. 2). The second condition is the same as that inEmbodiment 1. The second condition has a high selective ratio of thefirst mask pattern to the first conductive layer. By etching under thesecond condition, the third mask pattern 313 is selectively etched toform a fourth mask pattern 322, and an exposed upper edge of the thirdconductive layer 311 is etched selectively than the lower edge of thethird conductive layer 311. As a result, a fourth conductive layer 321having different inclined planes 322 can be formed. As an etchingmethod, any one of etching methods nominated in the first condition canbe appropriately used.

An exposed region of the first insulating layer 101 is etched, and thethickness of the first insulating layer 101 is slightly reduced.Accordingly, a second insulating layer 133 having difference in level isformed.

As illustrated in FIG. 5F, the fourth conductive layer 321 havingdifferent inclined planes 332 can be formed by removing the fourth maskpattern 322.

A shape of a cross-section of a conductive layer formed according tothis embodiment is explained with reference to FIG. 8. The side of aconductive layer 601 formed according to a process according to thisembodiment has a first inclined plane 602 and a second inclined plane603 as illustrated in FIG. 8. An angle formed by the first inclinedplane 602 and the surface of an insulating layer 600 is referred to asθ1, whereas an angle formed by a plane formed by extending the secondinclined plane 603 and the surface of the insulating layer 600 isreferred to as θ2. The θ1 is in a range of 50 to 70°, whereas θ2 is in arange of 20 to 60°, preferably, in a range of 38 to 54°.

By forming the conductive layer by the process according to thisembodiment, a region formed by the first inclined plane 602 and thesecond inclined plane 603 can be formed by not only an interface oflayers, each of which is made from different materials, but also a sideface of a layer made from the same material.

Particles on a wiring having such the structure are readily washed awayby performing a washing process in a process for forming an oxide layerafter a first etching treatment. As a result, particles on the wiringover the substrate and a semiconductor device can be reduced.Especially, the density of particles between wirings can be reduced, andso short-circuiting of the wirings and cracking in an upper insulatinglayer can be reduced.

A difference in projection and depression between wirings can be reducedin a semiconductor device having a multi-wire structure, and so coverageof an insulating layer provided between the wirings can be improved andshort-circuiting between a lower layer wiring and an upper layer wiringcan be prevented. Moreover, in the case that the insulating layer isformed by a coating method over the upper layer of the wiring, the stepheight reduction ratio of the insulating layer can be improved, andexposure of a fine pattern over the insulating layer is possible. As aresult, the wiring can be formed into fine, which can lead to highintegration.

Embodiment 4

In this embodiment, a method for manufacturing a wiring having a sidehaving a plurality of inclined planes by an etching condition that isdifferent from that described in Embodiment 3 is explained withreference to FIGS. 2, 6A to 6E, and 8.

As illustrated in FIG. 6A, as is the case with Embodiment 1, a firstinsulating layer 101 is formed over a substrate 100, and a firstconductive layer 102 is formed over the insulating layer 101. Then, afirst mask pattern 103 is formed over the first conductive layer 102 (astep S101 in FIG. 2).

As illustrated in FIG. 6B, the first conductive layer 102 is etched byusing the first mask pattern 103 under a first condition to form asecond conductive layer 211. As with the first condition described inEmbodiment 2, the first condition is the condition by which the firstconductive layer is anisotropically etched, typically, a conductivelayer having a perpendicular side to the surface of the substrate 100 isformed. As a result, the second conductive layer 211 has the side, whichroughly corresponds to the edge of the first mask pattern 103, and whichis roughly perpendicular to the surface of the second conductive layer211 that is not overlapped with the first mask pattern 103 (a step S102in FIG. 2).

The first condition in this instance is, specifically; the condition bywhich a conductive layer that has a projection portion having a sidehaving cross-sectionally a right angle to the surface of the substrate100 is formed. The second conductive layer 211 has a shape having aprojection portion having a side having cross-sectionally a right angle.

As illustrated in FIG. 6C, an oxide layer 403 is formed by oxidizing thesurface of the second conductive layer 211 (a step S111 in FIG. 2). As amethod for forming an oxide layer 403, a method of forming an oxidelayer by washing the surface of the second conductive layer 302 withwater or ozone water; a method of forming an oxide layer by oxidizingthe second conductive layer 211 by exposing the substrate into the air;a method of forming an oxide layer by oxidizing the surface of thesecond conductive layer 211 by heating at appropriate temperature; orthe like can be used. By adopting the method of washing the surface ofthe second conductive layer 211 with water or ozone water as the methodfor forming an oxide layer, particles over the substrate can be washedaway.

As illustrated in FIG. 6D, a second conductive layer 211 is etched undera second condition while leaving the first mask pattern 103 to form athird conductive layer 431 having different inclined planes 433 (a stepS103 in FIG. 2). The second condition is the same as that inEmbodiment 1. The second condition has a higher selective ratio of thefirst mask pattern 103 to the second conductive layer 211 than that ofthe first condition. That is, an etching rate of the first mask pattern103 is higher than that of the second conductive layer 211. By etchingusing the second condition, the first mask pattern 103 is selectivelyetched to form a second mask pattern 421. That is, an exposed surface ofthe third conductive layer 431 is etched to selectively etch more theupper edge of the conductive layer than the lower edge of the conductivelayer. As a result, a third conductive layer 431 having differentinclined planes 433 can be formed. As an etching method, any one ofetching methods nominated in the first condition can be appropriatelyused.

According to the second condition, an oxide layer 403 formed over aplane of the second conductive layer 211 parallel to the substrate isetched. On the other hand, only an upper portion of an oxide layer 403formed over a perpendicular plane at the lower edge of the first maskpattern 103 is etched, and so an oxide 432 is remained at the side faceof the third conductive layer 431.

Further, the exposed region of the first insulating layer 101 is overetched and the thickness of the region is slightly reduced. Accordingly,a second insulating layer 133 having steps is formed.

As illustrated in FIG. 6E, the third conductive layer 431 having aplurality of inclined planes 433 can be formed by removing the secondmask pattern 421.

A shape of a cross-section of a conductive layer formed according tothis embodiment is explained with reference to FIG. 8. As is the casewith Embodiment 3, the side of a conductive layer 601 formed accordingto a process according to this embodiment has a first inclined plane 602and a second inclined plane 603 as illustrated in FIG. 8. An angleformed by the first inclined plane 602 and the surface of an insulatinglayer 600 is referred to as θ1, whereas an angle formed by a planeformed by extending the second inclined plane 603 and the surface of theinsulating layer 600 is referred to as θ2. The θ1 is in a range of 50°to 70°, whereas θ2 is in a range of 20° to 60°, preferably, in a rangeof 21° to 35°. A wiring having such the structure and a semiconductordevice having a multi-wire structure have an advantageous effect as isthe case with Embodiment 1.

By forming the conductive layer by the process according to thisembodiment, a region formed by the first inclined plane 602 and thesecond inclined plane 603 can be formed by not only a side face of alayer made from different materials but also a side face of a layer madefrom the same material.

Example 1

In this example, a process for forming a wiring by using an etchingmethod described in Embodiment 1 is explained with reference to FIGS. 3Ato 3D, 9A, and 9B.

As illustrated in FIG. 3A, a first insulating layer 101 is formed over asubstrate 100, and a first conductive layer 102 is formed over the firstinsulating layer 101. In this instance, Corning 1737 glass is used asthe substrate 100. As the insulating layer 101, a silicon oxide film isformed by using argon and oxygen as a sputtering gas (the flow ratio1:3, respectively) by a sputtering method using a silicon target to havea thickness of 100 nm. As the first conductive layer 102, a conductivelayer is formed to have a laminated structure by sequentially stackingover the insulating layer 101 a titanium layer with a thickness of 100nm, an aluminum-silicon alloy film with a thickness of 700 nm, and atitanium film with a thickness of 100 nm by a sputtering method. Thetitanium film is deposited by a sputtering method with a titanium targetand an argon gas. Further, the aluminum-silicon alloy film is depositedby a sputtering method using an argon gas and an aluminum targetincluding silicon of 2 wt %.

Then, a first mask pattern 103 is formed on the first conductive layer102 by a photolithography process. In this instance, resist is coatedover the first conductive layer 102 to be pre-baked at 50 to 150° C.Thereafter, the pre-baked resist is exposed by using a photomask anddeveloped by using developer. Consequently, the first mask pattern 103is formed.

And then, the first conductive layer 102 is etched under a firstcondition to form a second conductive layer 111. As the etchingprocessing, an ICP etching equipment is used. FIG. 23 illustrates thestructure of the ICP etching equipment. A reaction chamber 811 iscoupled with an etching gas supply means 813 and an exhaust means 814for keeping the reaction chamber under reduced pressure. A plasmageneration means is composed of a spiral coil 812 that is inductivelycoupled to the reaction chamber 811 via a quartz substrate, and a highfrequency (13.56 MHz) power supply means 815. Bias power is applied tothe substrate by a high frequency (13.56 MHz) power supply means 816 sothat a lower electrode 817 mounted with a substrate produces self bias.The etching processing uses etching gaseous species that are to besupplied; high-frequency power that is supplied from each of the highfrequency (13.56 MHz) power supply means 815 and 816; and etchingpressure as its main parameters.

In this example, a first etching processing is carried out under thefollowing conditions: BCl₃ and Cl₂ are used as an etching gas at a gasflow ratio of 60:20 (sccm), plasma is produced by applying RF (13.56MHz) power of 450 W at pressure of 1.9 Pa to a coiled electrode, RF(13.56 MHz) power of 100 W is applied to the substrate side (lowerelectrode 817), and substantial negative bias power is applied toproduce self bias voltage. An etching rate for titanium is about thesame as that of aluminum-silicon alloys. As a result, as illustrated inFIG. 3B, a second conductive layer 111 having a tapered portion in itsedge is formed. By the first etching process, the first mask pattern 103is etched, and the width and the thickness thereof are reduced. Such themask pattern is referred to as a second mask pattern 112. Different fromthe first conductive layer 102, the second conductive layer 111 isformed as an isolated pattern having a desired shape over the surface ofthe substrate.

A third mask pattern 121 is formed by recessing the second mask pattern112 under the second condition, simultaneously, the upper edge of thesecond conductive layer 111 is etched to form a third conductive layer131. In this example, the second etching processing is carried out underthe second conditions, that is, an ICP etching method is used, BCl₃ andCF₄ are used as an etching gas at a gas flow ratio of 40:40 (sccm),plasma is produced by applying RF (13.56 MHz) power of 500 W at pressureof 1.9 Pa to a coiled electrode, RF (13.56 MHz) power of 300 W isapplied to the substrate side (lower electrode), and substantialnegative bias power is applied to produce self bias voltage. An etchingrate of the second mask pattern 112 is higher than that of the secondconductive layer when using the CF₄ as the etching gas, that is, a thesecond mask pattern 112 has a higher etching rate than that of thesecond conductive layer 111. In the second condition, bias power isapplied so that higher self bias voltage can be produced than that inthe first conditions. As a result, the second mask pattern 112 can beselectively recessed.

As recessing the second mask pattern 112, the surface of the upperportion of the second conductive layer 111 becomes exposed. The exposedregion is gradually etched. As a result, as illustrated in FIG. 3C, athird conductive layer 131 having a curved edge 132 is formed. Since theexposed insulating layer 101 is also etched, the thickness of theexposed insulating layer 101 is slightly reduced than that of the otherregion of the insulating layer 101 that is overlapped with the thirdconductive layer 131.

Then, a wiring over a substrate having the third conductive layer 131can be manufactured by removing the third mask pattern 121 by stripper.FIGS. 9A and 9B illustrate respectively an SEM view and a schematic viewthereof of the third conductive layer 131.

FIG. 9A is an SEM view of the cross-section of the third conductivelayer 131, whereas FIG. 9B is a schematic view thereof. A thirdconductive layer 702 is formed over an insulating layer 701. It can befound that the edge of the third conductive layer 702 is curved.

The third conductive layer 702 formed according to this example has acurved surface. The curved surface is formed by crossing of differentinclined planes, which becomes to have a gently curved surface. A firstinclined plane is formed at a lower part of the side of the thirdconductive layer 702. The angle formed by the surface of the insulatinglayer 701 and a first inclined plane is referred to as θ1. On the otherhand, a second inclined plane is formed at an upper part of the side ofthe third conductive layer 702. The angle formed by the insulating layer701 and the second inclined plane is referred to as θ2. In thisinstance, θ1 is 62°, whereas θ2 is 44°.

Table 1 lists the angles θ1 and θ2 formed by each of the differentinclined planes of the conductive layer formed by the etching method asexplained in Embodiment 1 and the insulating layer.

TABLE 1 θ1(°) θ2(°) 64 44 57 42 68 44 65 48 61 42 56 47 65 49 66 48 5841 58 41 62 42 64 43 62 42 62 33 57 41 51 38 54 39 51 41

According to the above processes, a conductive layer having a curvedsurface can be formed.

Example 2

In this example, a process of forming a wiring by an etching methodexplained in Embodiment 2 is explained with reference to FIGS. 4A to 4D,10A, and 10B.

As illustrated in FIG. 4A, as is the case with Example 1, a firstinsulating layer 101 is formed over a substrate 100, and a firstconductive layer 102 is formed over the insulating layer 101. Then, asis the case with Example 1, a first mask pattern 103 is formed over thefirst conductive layer 102 by a photolithography process.

And then, the first conductive layer 102 is etched under a firstcondition to form a second conductive layer 211. In this example, a partof the first conductive layer 102 is anisotropically etched by a firstetching processing under a first condition, that is, an ICP etchingmethod is used, BCl₃ and Cl₂ are used as an etching gas at a gas flowratio of 40:40 (sccm), plasma is produced by applying RF (13.56 MHz)power of 700 W at pressure of 1.9 Pa to a coiled electrode, RF (13.56MHz) power of 50 W is applied to the substrate side (lower electrode),and substantial negative bias power is applied to produce self biasvoltage.

As a result, as illustrated in FIG. 4B, a second conductive layer 211 isformed to have a shape, a part of a side of the shape is perpendicularto a lower edge of the first mask pattern 103. In this example, sinceself bias voltage is lower than that in the first condition of Example1, only the first conductive layer 102 is anisotropically etched withoutetching the first mask pattern 103. Different from the second conductivelayer 111 in Example 1, the second conductive layer 211 is formed overan entire surface of the substrate 100, and having a convex shape.

The first mask pattern 103 is recessed by a second condition to form asecond mask pattern 221, simultaneously, the upper edge of the secondconductive layer 211 is etched to form a third conductive layer 231. Inthis example, the second condition in Example 1 is used as the secondcondition in this example. As a result, the surface of the upper portionof the second conductive layer becomes exposed. The exposed region isgradually etched. As a result, as illustrated in FIG. 4C, a thirdconductive layer 231 is formed to have an edge having a curved surface232. In this instance, a part of the exposed first insulating layer 101is also etched, and a second insulating layer 133 having difference inlevel is formed. The thickness of the region of the insulating layer 101that is not overlapped with the third conductive layer 231 is slightlyreduced than that of the insulating layer 101 that is overlapped withthe third conductive layer 231.

Then, a wiring over a substrate having the third conductive layer 231can be manufactured by removing the second mask pattern 221 by stripper.FIGS. 10A and 10B illustrate respectively an SEM view and a schematicview thereof of the third conductive layer 231.

FIG. 10A is an SEM view of the cross-section of the third conductivelayer, whereas FIG. 10B is a schematic view thereof. A third conductivelayer 802 is formed over an insulating layer 801. It can be found thatthe side of the third conductive layer 802 is curved as is the case withExample 1.

The third conductive layer 802 formed according to this example has acurved surface. The curved surface is formed by crossing of differentinclined planes, which becomes to have a gently curved surface. A firstinclined plane is formed at a lower part of the side of the thirdconductive layer 802. The angle formed by the surface of the insulatinglayer 801 and a first inclined plane is referred to as θ1. On the otherhand, a second inclined plane is formed at an upper part of the side ofthe third conductive layer 802. The angle formed by the insulating layer801 and the second surface is referred to as θ2. In this instance, θ1 is53°, whereas θ2 is 40°.

Table 2 lists the angles θ1 and θ2 formed by each of the differentinclined planes of the conductive layer formed by the etching method asexplained in Embodiment 2 and the insulating layer.

TABLE 2 θ1(°) θ2(°) 60 43 64 46 59 37 56 42 53 37 66 36 55 35 56 40

According to the above processes, the conductive layer having a curvedsurface can be formed.

Example 3

In this example, a process of forming a wiring by an etching methodexplained in Embodiment 3 is explained with reference to FIGS. 5A to 5E,11A, and 11B. In this example, a first condition and a second conditionwhich are the same as those explained in Example 1 are used to etch aconductive layer. Further, a process for oxidizing the surface of theconductive layer is included in these conditions.

A first insulating layer 101 is formed over a substrate 100, and a firstconductive layer 102 is formed over the first insulating layer 101 as isthe case with Example 1. Then, a first mask pattern 103 is formed overthe first conductive layer 102 by a photolithography process. And then,a second conductive layer 302 is formed by etching the first conductivelayer 102 under the first condition. In this example, a first etching iscarried out under the first condition, that is, an ICP etching method isused, BCl₃ and Cl₂ are used as an etching gas at a gas flow ratio of60:20 (sccm), plasma is produced by applying RF (13.56 MHz) power of 450W at pressure of 1.9 Pa to a coiled electrode, RF (13.56 MHz) power of100 W is applied to the substrate side (lower electrode), andsubstantial negative bias power is applied to produce self bias voltage.At this time, a part of the first conductive layer 102 is etched to forma second conductive layer 302 having a taper portion. As a result, asillustrated in FIG. 5B, the second conductive layer 302 is formed havinga taper portion at a lower edge of the first mask pattern 103.

As illustrated in FIG. 5B, a first oxide layer 303 is formed byoxidizing the second conductive layer 302. In this instance, pure wateris coated by a spin coating method on the surface of the secondconductive layer to be oxidized as is the case with Example 3. As aresult, particles over the substrate can be washed away.

Then, as illustrated in FIG. 5D, the second conductive layer 302 isetched under the first conditions, and a third conductive layer 311having a taper portion is formed. Different from the first and thesecond conductive layers 102 and 302, the third conductive layer 311 isformed as an isolated film pattern having a desired shape over thesubstrate. Further, a second mask pattern 312 is slightly etched. Themask pattern is referred as a third mask pattern 313.

The third mask pattern 313 is recessed under a second condition to forma fourth mask pattern 322, simultaneously, the upper edge of the thirdconductive layer 311 is etched to form a fourth conductive layer 321. Inthis example, the second condition in Example 1 is used as the secondcondition in this example. That is, CF₄ is used as an etching gas as inthe case with Example 1. Accordingly, the third mask pattern 313 can berecessed as illustrated in FIG. 5E. As a result, the surface of theupper portion of the third conductive layer 311 is exposed. The exposedportion is gradually etched to form a fourth conductive layer 321 havingdifferent inclined planes. At this time, a part of the exposedinsulating layer 101 is also etched to form a second insulating layer133 having difference in level. The thickness of the region of thesecond insulating layer 133 that is not overlapped with the fourthconductive layer 321 is slightly reduced than that of the insulatinglayer 133 that is overlapped with the fourth conductive layer 321.

Then, a wiring over the substrate 100 having the fourth conductive layer321 can be manufactured by removing the fourth mask pattern 322 bystripper. FIGS. 11A and 11B illustrate respectively an SEM view and aschematic view thereof of the fourth mask pattern 321.

FIG. 11A is an SEM view of the cross-section of the third conductivelayer, whereas FIG. 11B is a schematic view thereof. A fourth conductivelayer 902 is formed on an insulating layer 901. The side of the fourthconductive layer 902 has different inclined planes. A first inclinedplane is formed at a lower part of the side of the fourth conductivelayer 902. The angle formed by the surface of the insulating layer 901and a first inclined plane is referred to as θ1. On the other hand, asecond inclined plane is formed at an upper part of the side of thefourth conductive layer 902. The angle formed by the insulating layer901 and the second inclined plane is referred to as θ2. In thisinstance, θ1 is 65°, whereas θ2 is 40°.

Table 3 lists the angles θ1 and θ2 formed by each of the differentinclined planes of the conductive layer formed by the etching method asexplained in Embodiment 1 and the insulating layer.

TABLE 3 θ1(°) θ2(°) 67 49 65 49 67 50 67 47 61 41 66 45 60 38 59 40 5853 58 47 62 52 60 49 60 44 65 44 62 47 58 45 55 39 55 40 55 40 54 38

According to the above processes, the conductive layers having twodifferent inclined planes can be formed.

Example 4

In this example, a process of forming a wiring by an etching methodexplained in Embodiment 4 is explained with reference to FIGS. 6A to 6E,12A, and 12B. In this example, a first condition and a second conditionwhich are the same as those explained in Example 2 are used. Further, aprocess for oxidizing the surface of the conductive layer is included inthe process.

A first insulating layer 101 is formed over a substrate 100, and a firstconductive layer 102 is formed over the first insulating layer 101 as isthe case with Example 1. Then, a first mask pattern 103 is formed on thefirst conductive layer 102 by a photolithography process. And then, asecond conductive layer 211 is formed by etching the first conductivelayer 102 under the first condition.

In this example, a first etching is carried out under a first conditionthat is also used in Example 2. In this instance, a part of the firstconductive layer 102 is anisotropically etched. As a result, asillustrated in FIG. 6B, a second conductive layer 211 is formed to havea shape, a part of a side is perpendicular to a lower edge of the firstmask pattern 103. Similar to the second conductive layer 302 in Example3, the second conductive layer 211 is formed over the substrate, andhaving a concave shape.

As illustrated in FIG. 6C, a first oxide layer 403 is formed byoxidizing the second conductive layer 211. In this instance, pure wateris coated by a spin coating method over the surface of the secondconductive layer to be oxidized as is the case with Example 3. As aresult, particles over the substrate can be washed away.

The first mask pattern 103 is recessed by a second condition to form asecond mask pattern 421, simultaneously; the second conductive layer 211is etched to form a third conductive layer 431. In this example, thesecond condition in Example 1 is used as the second condition in thisexample. That is, CF₄ is used as an etching gas as in the case withExample 1. Accordingly, the first mask pattern 103 can be recessed asillustrated in FIG. 6D. As a result, the surface of the upper portion ofthe second conductive layer 211 is exposed. The exposed portion isgradually etched to form a third conductive layer 431 having differentinclined planes. The thickness of the region of the second insulatinglayer 133 that is not overlapped with the third conductive layer 431 isslightly reduced than that of the second insulating layer 133 that isoverlapped with the third conductive layer 431.

Then, the fourth conductive layer 431 can be manufactured by removingthe third mask pattern 421 by stripper. FIGS. 12A and 12B illustraterespectively an SEM view and a schematic view thereof of the fourthconductive layer.

FIG. 12A is an SEM view of the cross-section of the fourth conductivelayer, whereas FIG. 12B is a schematic view thereof. A fourth conductivelayer 1002 is formed on an insulating layer 1001. The side of the fourthconductive layer 1002 has different inclined planes. A first inclinedplane is formed at a lower part of the side of the fourth conductivelayer 1002. The angle formed by the surface of the insulating layer 1001and a first inclined plane is referred to as θ1. On the other hand, asecond inclined plane is formed at an upper part of the side of thefourth conductive layer 1002. The angle formed by the insulating layer1001 and the second inclined plane is referred to as θ2. In thisinstance, θ1 is 60°, whereas θ2 is 26°.

Table 4 lists the angles θ1 and θ2 formed by each of the differentinclined planes of the conductive layer formed by the etching method asexplained in Embodiment 4 and the insulating layer.

TABLE 4 θ1(°) θ2(°) 58 28 58 26 60 27 56 28 60 30 60 28 56 29 60 28 6127 62 24 60 34 58 31 60 26 61 24 61 21 63 25 66 33 70 33 64 33 64 32 6123 56 34 61 29 62 26

According to the above processes, the conductive layers having twodifferent inclined planes can be formed.

FIGS. 13A and 13B are graphs for showing results from Tables 1 to 4described in Examples 1 to 4.

Horizontal axes in FIGS. 13A and 13B represent θ1 (angle formed by aninclined plane formed at the lower side of the conductive layer and thesurface of the insulating layer), whereas vertical axes represent θ2(angle formed by an inclined plane formed at the upper side of theconductive layer and the surface of the insulating layer).

FIG. 13A shows θ1 and θ2 of the conductive layers formed according tothe process explained in Examples 1 and 2. The angles of θ1 and θ2 ofthe conductive layers formed according to Example 1 are represented bydiamond shapes, whereas the angles of θ1 and θ2 of the conductive layersformed according to Example 2 are represented by triangle shapes. The θ1of the conductive layer formed according to Example 1 is in a range of51° to 68°, and 50° to 700°, whereas the θ2 is in a range of 33° to 49°,and 20° to 60°.

The θ1 of the conductive layer formed according to Example 2 is in arange of 53° to 66°, and 50° to 70°, whereas the θ2 is in a range of 35°to 46°, and 20° to 60°.

FIG. 13B shows θ1 and θ2 of the conductive layer formed according to theprocess explained in Examples 3 and 4. The angles of θ1 and θ2 of theconductive layers formed according to Example 3 are represented bydiamond shapes, whereas the angles of θ1 and θ2 of the conductive layersformed according to Example 4 are represented by triangle shapes. The θ1of the conductive layer formed according to Example 3 is in a range of54 to 67°, and 50 to 70°, whereas the θ2 is in a range of 38 to 53°, and20 to 60°.

The θ1 of the conductive layer formed according to Example 4 is in arange of 56° to 70°, and 50° and 70°, whereas the θ2 is in a range of21° to 34°, and 20° to 60°.

Example 5

In this example, a method for manufacturing a light-emitting displaypanel as a display panel is explained with reference to FIGS. 14A to 16.FIG. 16 illustrate a plane structure of a pixel portion, whereas FIGS.14A to 15B illustrate schematically a vertical cross-sectional structureof FIG. 16 taken along lines of A-B and C-D. In this example, a fourthconductive layer is formed according to Embodiment 1, but notexclusively, a process according to any one of Embodiments 2 to 4 canalso be used.

As illustrated in FIG. 14A, a first insulating layer 2002 is formed tohave a thickness of 100 to 1000 nm over a substrate 2001. In thisinstance, as the first insulating layer 2002, a silicon oxide film witha thickness of 100 nm formed by a plasma CVD method and a silicon oxidefilm with a thickness of 480 nm formed by a reduced pressure thermal CVDmethod are stacked.

An amorphous semiconductor film is formed to have a thickness of 10 to100 nm. In this instance, an amorphous silicon film with a thickness of50 nm is formed by a reduced thermal pressure CVD method. The amorphoussilicon film is crystallized. In this example, a crystalline siliconfilm is formed by emitting laser light to the amorphous silicon film.Resist is coated over the crystalline silicon film to be pre-baked, andsemiconductor regions 2003 and 2004 are formed by removing unnecessaryportions of the crystalline silicon film by a first photolithographyprocess and a first etching treatment. A second insulating layer 2005serving as a gate insulating film is formed. In this instance, a siliconoxide film is deposited by a CVD method as the second insulating layer2005.

The semiconductor regions 2003 and 2004 may be formed by an organicsemiconductor material such as polythienylenevinylene,poly(2,5-thienylenevinylene), polyacetylene, polyacetylene derivatives,or polyarylenvinylene. Further, the second insulating layer 2005 can beformed by solution having an insulating property by using a dropletdischarging method, a coating method, a sol-gel method, or the like. Asthe solution having an insulating property, typically, solutiondispersed with fine particles of an inorganic oxide, polyimide,polyamide, polyester, acrylic, PSG (phosphorus glass), BPSG (phosphorusboron glass), silicate SOG (Spin on Glass), polysilazane SOG,alkoxysilicate SOG, siloxane polymer can be appropriately used.

A channel doping process for doping p-type or n-type impurities at a lowconcentration thoroughly or selectively to a region that is to be achannel region of a TFT is carried out. The channel doping process is aprocess for controlling threshold voltage of the TFT. In this instance,boron is doped by an ion doping method by which diborane (B₂H₆) is notmass-separated but plasma-activated. An ion plantation method thatcarries out mass separation can be used.

Then, a first conductive layer is formed. In this instance, the firstconductive layer is formed by stacking a tantalum nitride (TaN) film anda tungsten (W) film by using a sputtering method. Then, resist is coatedover the first conductive layer to be pre-baked. And then, secondconductive layers 2006 to 2008 serving as gate electrodes and a secondconductive layer 2009 serving as a capacitor wiring are formed by asecond photolithography process and a second etching processing.

The second conductive layers 2006 to 2009 can be formed by using aconductor such as Ag or Au by a droplet discharging method, a printingmethod, an electroplating method, or the like. In this case, the numberof processes can be reduced since the second conductive layers can beformed without performing the photolithography processing.

Then, low doped drain regions 2010 a, 2011 a, 2013 a, and 2014 a, andhigh doped drain regions 2010 to 2014 are formed by doping phosphorousin a self-alignment manner by using the second conductive layers 2006 to2009 as masks. The phosphorous concentration of the low doped drainregions is adjusted to be 1×10¹⁶ to 5×10¹⁸ atoms/cm³ (typically, 3×10¹⁷to 3×10¹⁸ atmos/cm³), and the phosphorous concentration of the highdoped drain regions is adjusted to be 1×10²⁰ to 1×10²¹ atoms/cm³(typically, 2×10²⁰ to 5×10²⁰ atmos/cm³). Among the semiconductor regions2003 and 2004, regions that are overlapped with thick parts of thesecond conductive layers 2006 to 2008 serve as channel formationregions.

A third insulating layer is formed to cover the second conductive layers2006 to 2009. In this instance, an insulating film containing hydrogenis formed. Thereafter, impurities doped to the semiconductor regions areactivated and the semiconductor regions are hydrogenated. As theinsulating film containing hydrogen, a silicon nitride oxide film (SiNOfilm) formed by a plasma CVD method is used.

The third conductive layer can be formed by coating and baking aphotosensitive or non-photosensitive organic material (polyimide,acrylic, polyamide, polyimideamide, resist, or benzocyclobutene).Alternatively, the third conductive layer can be formed by coating andbaking PSG (phosphorous glass), BPSG (phosphorous boron glass),polysilazane SOG, silicate SOG (Spin on Glass), alkoxy silicate SOG, orsiloxane polymer.

Further, the third conductive layer can be formed by stacking a siliconoxide film, a silicon nitride film, a silicon oxynitride film, or asilicon nitride oxide film, each of which is formed by a CVD method.Alternatively, the third conductive layer can be formed by stacking twoor more of the foregoing layers.

Then, resist is coated over the third insulating layer to be pre-baked.And then, a fourth insulating layer 2015 having an opening portion isformed by a third photolithography process and a third etchingtreatment, simultaneously, a part of the semiconductor regions isexposed. Thereafter, a third conductive layer 2021 is formed. The thirdconductive layer 2021 is formed to have a three layered structure formedsequentially by sputtering a titanium film, an aluminum-silicon alloyfilm, and a titanium film.

Then, resist is coated over the third conductive layer 2021 to bepre-baked, and first mask patterns 2017 to 2020 are formed by a fourthphotolithography process.

The first mask patterns 2017 to 2020 may be formed by dischargingorganic resin such as polyimide, acrylic, polyamide, or polyimideamideto a predetermined position by a droplet discharging method and baking.

As illustrated in FIG. 14B, the fourth conductive layers 2025 to 2028are formed by using the first mask patterns 2017 to 2020 by a fourthetching process and a fifth etching process. In this instance, thefourth and fifth etching processes are carried out under the first andsecond conditions described in Example 1 to form fourth conductivelayers 2025 to 2028. Since the side of a fourth conductive layer has acurved surface, cracks in the insulating layer that is formed afterwardscan be reduced. By the foregoing processes, a wiring can be formed.

As illustrated in FIG. 15A, a fifth insulating layer is formed. Thefifth insulating layer is formed by an inorganic insulating layer by aCVD method (silicon oxide, silicon nitride, silicon oxynitride, or thelike), a photosensitive or non-photosensitive organic resin layer by acoating method (polyimide, acrylic, polyamide, polyimideamide, resist,or benzocyclobutene), or a laminated layer of the foregoing layers.

As the fifth insulating layer, an insulating layer capable of beingplanarized is preferably used. As the insulating layer capable of beingplanarized, the foregoing photosensitive or non-photosensitive organicresin layer formed by a coating method; an insulating layer formed by anSiOx layer by a coating method; or an insulating layer formed by coatingand baking inorganic siloxane polymer as typified by silica glass, alkylsiloxane polymer, alkylsilsesquioxane polymer, hydrogenatedsilsesquioxane polymer, organic siloxane polymer as typified byhydrogenated alkylsilsesquioxane polymer can be used. As an example ofthe siloxane polymer, PSB-K1 or PSB-K31 that is a coat insulating filmmaterial manufactured by Toray Industries, Inc., or ZRS-5PH manufacturedby Catalysts & Chemicals Ind. Co., Ltd. can be used. In this instance,the fifth insulating layer is formed by coating and baking acrylicresin. By using an organic material dissolved or dispersed with amaterial that absorbs visible light such as black pigment or dye as thefifth insulating layer, stray light can be absorbed in a light-emittingelement that is formed afterwards, which leads to improve contrast.

Then, resist is coated over the fifth insulating layer to be pre-baked.And then, a sixth insulating layer 2031 having an opening portion byetching the fifth insulating layer by a sixth photolithography processand a sixth etching process, simultaneously, a part of the fourthconductive layer 2028 is exposed.

A fifth conductive layer is formed, and resist is coated over the fifthconductive layer to be pre-baked. Then, a sixth conductive layer 2035 isformed by a seventh photolithography process and a seventh etchingprocess. The sixth conductive layer 2035 serves as a first pixelelectrode. As the fifth conductive layer, a reflective conductive filmand a transparent conductive film are stacked. In this instance, analloy film of carbon, nickel, and aluminum; and ITO containing siliconoxide are stacked by a sputtering method. Also refer to FIG. 16 thatillustrates a plane structure of FIG. 15A taken along lines of A-B andC-D.

As illustrated in FIG. 15B, a seventh insulating layer 2041 that coversthe edge of the sixth conductive layer 2035 to serve as a bank and ablack matrix is formed. The seventh insulating layer is an insulatorhaving a light-shielding property and is formed by a photosensitive ornon-photosensitive organic material dissolved or dispersed with amaterial that absorbs visible light such as black pigment or dye(polyimide, acrylic, polyamide, polyimideamide, resist, orbenzocyclobutene), or an SOG film (for example, an SiOx film includingan alkyl group) to have a thickness of 0.8 to 1 μm. For instance, COLORMOSAIC CK (product name) manufactured by FUJIFILM Electronics MaterialsCo., Ltd. is used. By forming the sixth insulating layer 2031 by aninsulator having a light-shielding property, an effect of lightshielding can also be obtained from the sixth insulating layer 2031 inaddition to the seventh insulating layer 2041. The seventh insulatinglayer 2041 is preferably formed by a photosensitive material since theside of the seventh insulating layer 2041 can be formed to have a radiusof curvature that varies continuously and a thin film over the seventhinsulating layer 2041 can be formed without step cut.

The seventh insulating layer 2041 can be formed by a droplet dischargingmethod or a printing method.

Then, a layer containing a light-emitting substance 2042 is formed bycoating a light-emitting material by a vapor deposition method, acoating method, a droplet discharging method, or the like and to bebaked over the sixth conductive layer 2035 and over the edge of theseventh insulating layer 2041. Thereafter, a seventh conductive layer2043 serving as a second pixel electrode is formed over the layercontaining the light-emitting substance 2042. In this instance, ITOcontaining silicon oxide is deposited by a sputtering method. As aresult, a light-emitting element can be formed by the sixth conductivelayer, the layer containing a light-emitting substance, and the seventhconductive layer. Each material of the conductive layers and the layercontaining a light-emitting substance for constructing thelight-emitting element is appropriately selected. Further, thethicknesses of each of the layers are adjusted.

Before forming the layer containing a light-emitting substance 2042,moisture in the seventh insulating layer 2041 or adsorbed to the surfacethereof is removed by heat treatment at 200° C. in the atmosphere.Further, it is preferable that heat treatment is performed at 200 to400° C., preferably, 250 to 350° C. in reduced pressure and the layercontaining a light-emitting substance 2042 is formed by a vacuum vapordeposition method or a droplet discharge method in reduced pressure.

The layer containing a light-emitting substance 2042 may be formed by acharge injecting-transporting material containing an organic compound oran inorganic compound and a light-emitting material; may include one ora plurality kinds of layers selected from a low molecular organiccompound, an intermediate molecular organic compound as typified bydendrimer, oligomer, or the like, and a high molecular organic compound;and may be combined with an inorganic compound having an electroninjecting-transporting property or a hole injecting-transportingproperty.

Among charge injecting transporting materials, as a material having anextra-high electron transporting property, for example, a metal complexor the like having a quinoline skeleton or a benzoquinoline skeletonsuch as tris(8-quinolinolato)aluminum (abbreviated as Alq₃),tris(5-methyl-8-quinolinolato)aluminum (abbreviated as Almq₃),bis(10-hydroxybenzo[h]-quinolinato)beryllium (abbreviated as BeBq₂),bis(2-methyl-8-quinolinolato)-4-phenylphenolato-aluminum (abbreviated asBAlq).

As a material having a high hole transporting property, for example,aromatic amine (that is, the one having a benzene ring-nitrogen bond)based compounds such as 4,4′-bis[N-(1-naphthyl)-N-phenyl-amino]-biphenyl(abbreviated as α-NPD),4,4′-bis[N-(3-methylphenyl)-N-phenyl-amino]biphenyl (abbreviated asTPD), 4,4′,4″-tris(N,N-diphenyl-amino)-triphenylamine (abbreviated asTDATA), 4,4′,4″-tris[N-(3-methylphenyl)-N-phenyl-amino]-triphenylamine(abbreviated as MTDATA).

Among charge injecting transporting substances, as a material having ahigh electron injecting property, a compound of an alkali metal or analkali earth metal such as lithium fluoride (LiF), cesium fluoride(CsF), calcium fluoride (CaF₂), or the like can be nominated. Besides, amixture of a material having a high electron transportation propertysuch as Alq₃ and an alkali earth metal such as magnesium (Mg).

Among charge injecting transporting substances, as a material having ahigh hole injecting property, for example, a metal oxide such asmolybdenum oxide (MoOx), vanadium oxide (VOx), ruthenium oxide (RuOx),tungsten oxide (WOx), manganese oxide (MnOx), or the like can benominated. Besides, a phthalocyanine compound such as phthalocyanine(abbreviated H₂Pc) or copper phthalocyanine (CuPc) can be nominated.

Light-emitting layers having different emission wavelength bands may berespectively provided to each pixel for color display. Typically,light-emitting layers corresponding to color of R (red), G (green), andB (blue) are formed. In this instance, color purity can be improved anda pixel portion can be prevented from being a mirror surface(reflection) by providing a filter (colored layer) that transmits lightin each emission wavelength bands at the light emission side of thepixel. By providing the filter (colored layer), a circularly-polarizedlight plate or the like that is conventionally required becomes notrequired, moreover, light can be emitted from the light-emitting layerwithout loss of light. Moreover, change in hue occurred in the case ofviewing obliquely the pixel portion (display screen) can be reduced.There are various light-emitting materials for forming a light-emittinglayer. As a low molecular based organic light-emitting material,4-(dicyanomethylene)-2-methyl-6-[2-(1,1,7,7-tetramethyljulolidine-9-yl)ethenyl]-4H-pyran(abbreviated as DCJT), 9,10-diphenylanthracene (abbreviated as DPA),periflanthene,2,5-dicyano-1,4-bis[2-(10-methoxy-1,1,7,7-tetramethyljulolidine-9-yl)ethenyl]benzene,N,N′-dimethylquinacridone (abbreviated as DMQd), coumarin 6, coumarin545T, tris(8-quinolinolato)aluminum (abbreviated as Alq₃),9,9′-bianthryl, 9,10-diphenylanthracene (abbreviated as DPA),9,10-di(2-naphthyl)anthracene (abbreviated as DNA), or the like can beused. Another material may be used.

A high molecular based organic light-emitting material has higherphysical strength than that of a low molecular based organiclight-emitting material, and so a light-emitting element can bemanufactured to have high durability. A light-emitting element can becomparatively readily manufactured since the light-emitting element canbe formed by a coating method. A structure of a light-emitting elementusing a high molecular based organic light-emitting material isbasically same as that of a light-emitting element using a low molecularbased organic light-emitting material. The structure is composed ofcathode/layer containing a light-emitting substance/anode. However, inthe case of forming the layer containing a light-emitting substance byusing a high molecular based organic light-emitting material, it isdifficult to form a layered structure like in the case of using a lowmolecular based organic light-emitting material. Most light-emittingstructures have two-layered structures. Specifically, the structure iscathode/light-emitting layer/hole transporting layer/anode.

Since emission color is dependent on a material for forming alight-emitting layer. By selecting the material, a light-emittingelement that exhibits desired light emission can be formed. As a highmolecular based light-emitting material, a polyparaphenylene vinylenebased material, a polyparaphenylene based material, polythiophene basedmaterial, or a polyfluorene based material can be nominated.

As the polyparaphenylene vinylene based material, a derivative ofpoly(praraphenylene vinylene) [PPV], poly(2,5-dialkoxy-1,4-phenylenevinylene) [RO-PPV], poly(2-(2′-ethyl-hexoxy)-5-methoxy-1,4-phenylenevinylene) [MEH-PPV], poly(2-dialkoxyphenyl)-1,4-phenylenevinylene][ROPh-PPV], and the like are nominated. As the polyparaphenylene basedmaterial, a derivative of polyparaphenylene [PPP],poly(2,5-dialkoxy-1,4-phenylene) [RO-PPP],poly(2,5-dihexoxy-1,4-phenylene), and the like are nominated. As thepolythiophene based material, a derivative of polythiophene [PT],poly(3-alkylthiophene) [PAT], poly(3-hexylthiophene) [PHT],poly(3-cyclohexylthiophene) [PCHT], poly(3-cyclohexyl-4-methylthiophene)[PCMHT], poly(3,4-dicyclohexylthiophene) [PDCHT],poly[3-(4-octylphenyl)-thiophene] [POPT],poly[3-(4-octylphenyl)-2,2-bithiophene] [PTOPT], and the like arenominated. As the polyfluorene based material, a derivative ofpolyfluorene [PF], poly(9,9-dialkylfluorene) [PDAF],poly(9,9-dioctylfluorene) [PDOF], and the like are nominated.

A hole injecting property from the anode can be improved by interposinga high molecular based organic light-emitting material having a holetransporting property between the anode and a high molecular basedorganic light-emitting material having a light-emitting property.Generally, the high molecular based organic light-emitting materialhaving a hole transporting property and an acceptor material dissolvedin water is coated by spin coating. The high molecular based organiclight-emitting material having a hole transporting property is notdissolved in organic solvent, accordingly, the material can be stackedover the organic light-emitting material having a light-emittingproperty. As the high molecular based organic light-emitting materialhaving a hole transporting property, mixture of PEDOT and camphoricsulfonic acid (CSA) as an acceptor material, mixture of polyaniline[PANI] and polystyrene sulfonic acid [PSS] as an acceptor material, andthe like can be nominated.

The light-emitting layer can be formed to exhibit mono emission color orwhite emission color. In the case of using a white emission material,color display can be realized when a color filter that transmits lightat a specified wavelength is provided at the side of light emission of apixel.

To form a light-emitting layer that exhibits white emission, forexample, Alq₃, Alq₃ partly doped with Nile red (Nile red is a redpigment), p-EtTAZ, TPD (aromatic diamine) are deposited sequentially bya vapor deposition method. In the case that the light-emitting layer isformed by a coating method using a spin coating method, the material ispreferably baked by vacuum heating after coating a light-emittingmaterial. For example, poly(ethylene dioxythiophene)/poly(styrenesulfonate) solution (PEDOT/PSS) may be coated over a whole surface andbaked, and polyvinylcarbazole (PVK) solution doped with emission centerpigments (1,1,4,4-tetraphenyl-1,3-butadiene (abbreviated TPB),4-dicyanomethylene-2-methyl-6-(p-dimethylamino-styryl)-4H-pyran (DCM1),Nile red, coumarin 6, or the like) serving as a light-emitting layer maybe coated over a whole surface and baked.

The light-emitting layer may be formed by a single layer. In thisinstance, the light-emitting layer may be made from polyvinylcarbazole(PVK) having a hole transporting property dispersed with a1,3,4-oxadiazole derivative (PBD) having an electron transportingproperty. Further, white emission can be obtained by dispersing PBD of30 wt % as an electron transporting agent and dispersing an appropriateamount of four kinds of pigments (TPB, coumarin 6, DCM1, and Nile red).In addition to the light-emitting element that exhibits white emissionas explained in the foregoing, a light-emitting element that can exhibitred emission, green emission, or blue emission can be manufactured byselecting approximately a material of a light-emitting layer.

Furthermore, a triplet excited light-emitting material including a metalcomplex or the like may be used for the light-emitting layer in additionto a singlet excited light-emitting material. For example, among a pixelhaving a red light-emitting property, a pixel having a greenlight-emitting property, and a pixel having a blue light-emittingproperty; the pixel having a red light-emitting property withcomparatively short half reduced luminescence time is formed from atriplet excited light-emitting material, and other pixels are formedfrom a singlet excited light-emitting material. Since the tripletexcited light-emitting material has superior luminous efficiency, alight-emitting element requires much less power to obtain the same levelof luminance. In other words, a light-emitting element requires a fewamount of current in the case of applying the triplet excitedlight-emitting material to a red pixel, therefore, the reliability canbe enhanced. The pixel having red light-emitting properties and thepixel having green light-emitting properties may be formed by a tripletexcited light-emitting material and the pixel having blue light-emittingproperties may be formed by a singlet excited light-emitting material toreduce the power consumption. The power consumption can be reduced byalso forming the green light-emitting element having high human spectralluminous efficacy by a triplet excited light-emitting material. As anexample of a triplet excited light-emitting material, a material using ametal complex as a dopant such as a metal complex having platinum thatis a third transition series element as a center metal or a metalcomplex having iridium as a center metal is known. The triplet excitedlight-emitting material is not limited to these compounds, and it isalso possible to use a compound having the above structure and having anelement belonging to Groups 8 to 10 of a periodic table as a centermetal. The substance mentioned above that forms the layer containinglight-emitting substance is just an example, and a light-emittingelement can be formed by appropriately stacking each functional layersuch as a hole injecting transporting layer, a hole transporting layer,an electron injecting transporting layer, an electron transportinglayer, a light-emitting layer, an electron blocking layer, or a holeblocking layer. In addition, a mixed layer or a mixed junction may beformed with the combination of each layer.The light-emitting element formed by using the material mentioned aboveis emitted by having bias in the forward direction. A pixel of a displaydevice formed by using the light-emitting element can be driven by asimple matrix system or an active matrix system. In either system, eachpixel is emitted by applying forward bias at particular timing; however,the pixel is in non-luminescent state within the specified period. Thereliability of the light-emitting element can be enhanced by applyingreverse bias during non-luminescent time. The light-emitting elementbecomes a decline mode when light-emitting intensity is deterioratedunder a certain driving condition or when luminance is apparentlydeteriorated due to the expansion of non-luminescent region in a pixel.However, the deterioration can be delayed and the reliability of adisplay device can be enhanced by alternating current driving by whichforward bias and reverse bias are applied.

Then, a transparent protective film 2044 for covering a light-emittingelement to prevent moisture from penetrating into the light-emittingelement is formed. As the transparent protective film 2044, a siliconnitride film, a silicon oxide film, a silicon oxynitride film (SiNO film(composition ratio: N>O) or a SiON film (composition ratio: N<O), a thinfilm including carbon as its main component (for example, a DLC film, CNfilm)), or the like, each of which is obtained by a sputtering method ora CVD method can be used.

In accordance with the foregoing processes, a light-emitting displaypanel having a multi-wire structure can be formed. A protective circuitfor preventing electrostatic destruction as typified by a diode may beprovided between the connecting terminal and the source wiring (gatewiring), or in a pixel portion. In this instance, electrostaticdestruction can be prevented by manufacturing the diode in accordancewith the same process as that of the foregoing TFT and connecting thegate wiring layer of the pixel portion to the drain wiring layer or thesource wiring layer of the diode.

Any one of Embodiments 1 to 4 can be applied to this example. Alight-emitting display panel is explained as a display panel, but thedisplay panel is not limited thereto. The present invention can beappropriately applied to an active display panel such as a liquidcrystal display panel, a DMD (Digital Micromirror Device), a PDP (PlasmaDisplay Panel), an FED (Field Emission Display), and an electrophoreticdisplay device (electronic paper).

Example 6

The mode of a light-emitting element that is applicable to the foregoingexamples is explained with reference to FIGS. 17A to 17D.

FIG. 17A shows an example of forming a first pixel electrode 11 by anoxide conductive material transparent to light, which contains siliconoxide at a concentration of 1 to 15 atom %. A layer containing alight-emitting substance 16 formed by stacking a hole injecting layer ora hole transporting layer 41, a light-emitting layer 42, and electrontransporting or injecting layer 43 is provided over the first pixelelectrode 11. A second pixel electrode 17 is formed by a third electrodelayer 33 containing an alkali metal or an alkali earth metal such as LiFor MgAg, and a fourth electrode layer 34 formed by a metal material suchas aluminum. A pixel having the structure can emit light from the sideof the first pixel electrode 11 as indicated by arrows in the FIG. 17A.

FIG. 17B shows an example of emitting light from the second pixelelectrode 17, in which the first pixel electrode 11 is composed of afirst electrode layer 35 made from metal such as aluminum or titanium,or a metal material containing the metal and nitrogen at stoichiometriccomposition ratio or less; and a second electrode layer 32 made from anoxide conductive material containing silicon oxide at a concentration of1 to 15 atom %. A layer containing a light-emitting substance 16 formedby stacking a hole injecting or hole transporting layer 41, alight-emitting layer 42, and an electron transporting layer or anelectron injecting layer 43 is provided over the first pixel electrode11. The second pixel electrode 17 is formed by a third electrode layer33 containing an alkali metal or an alkali earth metal such as LiF orCaF, and a fourth electrode layer 34 formed by a metal material such asaluminum. Light can be emitted passing through the second electrode 17by forming each of the layers to have a thickness of 100 nm or less tobe capable of transmitting light.

FIG. 17E illustrates an example of emitting light from both directions,that is, the first electrode 11 and the second electrode 17, in whichthe first pixel electrode 1 is formed by a conductive film havingtransmittance and a large work function, whereas a second pixelelectrode 17 is formed by a conductive film having transmittance and asmall work function. Typically, the first pixel electrode 11 is formedby an oxide conductive material containing silicon oxide at aconcentration of 1 to 15 atom %, and the second electrode 17 is formedby the third electrode layer 33 containing an alkali metal or an alkaliearth metal such as LiF or CaF having a thickness of 100 nm or less, andthe fourth electrode layer 34 formed by a metal material such asaluminum having a thickness of 100 nm or less.

FIG. 17C shows an example of emitting light from a first pixel electrode11, in which a layer containing a light-emitting substance 16 is formedby stacking sequentially an electron transporting or an electroninjecting layer 43, a light-emitting layer 42, and a hole injecting or ahole injecting transporting layer 41. A second pixel electrode 17 isformed by sequentially stacking a second electrode layer 32 made from anoxide conductive material containing silicon oxide at a concentration of1 to 15 atom %; and a first electrode layer 35 made from a metalmaterial such as aluminum or titanium, or a metal material containingthe metal and nitrogen at stoichiometric composition ratio or less overthe layer containing a light-emitting substance 16. The first pixelelectrode 11 is formed by a third electrode layer 33 containing analkali metal or an alkali earth metal such as LiF or CaF, and a fourthelectrode layer 34 formed by a metal material such as aluminum. Lightcan be emitted passing through the first pixel electrode 11 by formingeach of the layers to have a thickness of 100 nm or less to be capableof transmitting light.

FIG. 17D shows an example of emitting light from the second pixelelectrode 17, in which a layer containing a light-emitting substance 16is formed by stacking sequentially an electron transporting layer or anelectron injecting layer 43, a light-emitting layer 42, a hole injectingor a hole transporting layer 41. The first pixel electrode 11 is formedto have the same structure as that illustrated in FIG. 17A to have athickness that can reflect light emitted from the layer containing alight-emitting substance. A second pixel electrode 17 is made from anoxide conductive material containing silicon oxide at a concentration of1 to 15 atom %. In this structure, the hole injecting or transportinglayer 41 is made from a metal oxide that is an inorganic material(typically, molybdenum oxide or vanadium oxide); and so oxygen that isintroduced in forming the second electrode layer 32, a hole injectingproperty is improved, and driver voltage can be lowered.

FIG. 17F illustrates an example of emitting light from both directions,that is, the first electrode 11 and the second electrode 17, in whichthe first pixel electrode 11 is formed by a conductive film havingtransmittance and a small work function, whereas a second pixelelectrode 17 is formed by a conductive film having transmittance and alarge work function. Typically, the first pixel electrode 11 may becomposed of a third electrode layer 33 containing an alkali metal or analkali earth metal such as LiF or CaF having a thickness of 100 nm orless, and a fourth electrode layer 34 made from a metal material such asaluminum. The second pixel electrode 17 may be formed by an oxideconductive material containing silicon oxide at a concentration of 1 to15 atom %.

Example 7

A pixel circuit and an operation structure thereof of the light-emittingdisplay panel explained in the foregoing examples are explained withreference to FIGS. 18A to 18F. In a digital display device, theoperation structure of the light-emitting display panel can be dividedinto operation in which a video signal input in a pixel is regulated byvoltage and operation in which a video signal input in a pixel isregulated by current. As the operation in which a video signal input ina pixel is regulated by voltage, operation in which voltage that isapplied to a light-emitting element constant is constant (CVCV), andoperation in which current that is applied to a light-emitting elementis constant (CVCC) can be nominated. As the operation in which a videosignal input in a pixel is regulated by current, operation in whichvoltage that is applied to a light-emitting element is constant (CCCV),and operation in which current that is applied to a light-emittingelement is constant (CCCC) can be nominated. In this example, pixels ofCVCV operation are explained with reference to FIGS. 18A and 18B. Pixelsof CVCC operation are explained with reference to FIGS. 18C to 18F.

In pixels illustrated in FIGS. 18A and 18B, a signal line 3710 and apower source line 3711 are arranged in column, whereas a signal line3714 is arranged in rows. The pixels have a switching TFT 3701, a driverTFT 3703, a capacitor 3702, and a light-emitting element 3705.

The switching TFT 3701 and the driver TFT 3703 operate in a linearregion when they are ON. The driver TFT 3703 serves to control whetheror not applying voltage to the light-emitting element 3705. Both of theTFTs preferably have the same conductivity types in the light of themanufacturing steps. In this example, both of the TFTs are formed tohave p-channel TFTs. As the driver TFT 3703, not only an enhancementtype but also a depletion type can be used. The ratio of a channel widthW of the driver TFT 3703 and a channel length L of the driver TFT 3703(W/L) are preferably 1 to 1000 though it depends on TFT mobility. Theon-current of the TFT is improved with increasing the W/L.

In the pixels illustrated in FIGS. 18A and 18B, the switching TFT 3701serves to control the input of a video signal to a pixel. Upon turningthe TFT 3701 into ON, a video signal is input to the pixel. Then, thevoltage of the video signal is stored in a capacitor 3702.

In the case that the power source line 3711 is Vss and an opposingelectrode of the light-emitting element 3705 is Vdd in FIG. 18A, thatis, in the case of FIGS. 17C, 17D and 17F, the opposing electrode of thelight-emitting element is an anode, and the electrode connected to thedriver TFT 3703 is a cathode. In this instance, it is possible tosuppress luminance irregularity due to dispersion of characteristics ofthe driver TFT 3703.

In the case that the power source line 3711 is Vdd and an opposingelectrode of the light-emitting element 3705 is Vss in FIG. 18A, thatis, in the case of FIGS. 17A, 17B and 17E, the opposing electrode of thelight-emitting element is a cathode, and the electrode connected to thedriver TFT 3703 is an anode. In this instance, a video signal havinghigher voltage than that of the Vdd is input to the signal line 3710,and so voltage of the video signal is stored in the capacitor 3702 andthe driver TFT 3701 operates in a linear region. Accordingly, luminanceirregularity due to dispersion characteristics of the TFT can beimproved.

The pixel illustrated in FIG. 18B has the same pixel structure as thatillustrated in FIG. 18A except the point of adding a TFT 3706 and ascanning line 3715.

The ON/OFF of the TFT 3706 is controlled by the scanning line 3715 thatis newly provided. Upon turning the TFT 3706 into ON, charges stored inthe capacitor 3702 are discharged and the TFT 3703 is turned into OFF.That is, the state in which current is forced to stop flowing in thelight-emitting element 3705 can be made depending on the arrangement ofthe TFT 3706. Accordingly, the TFT 3706 can be referred to as an erasingTFT. Therefore, the structure illustrated in FIG. 18B can start alighting period simultaneously with or immediately after the start of awriting period without waiting writing of a signal to all pixels. As aresult, duty ratio of light emission can be improved.

In a pixel having the foregoing structure, the current value of thelight-emitting element 3705 can be determined by the driver TFT 3703that operates in a linear region. According to the foregoing structure,dispersion of TFT characteristics can be suppressed. Accordingly, adisplay device with improved image quality can be provided by improvingluminance irregularity of the light-emitting element due to dispersionof TFT characteristics.

Then, pixels of CVCC operation are explained with reference to FIGS. 18Cto 18F. The pixel illustrated in FIG. 18C is formed by providing a powersource line 3712 and a current control TFT 3704 to the pixel structureillustrated in FIG. 18A.

The pixel illustrated in FIG. 18E has the same structure as thatillustrated in FIG. 18C except the point that the gate electrode of thedriver TFT 3703 is connected to the power source line 3712, which isarranged in rows. That is, both of the pixels illustrated in FIGS. 18Cand 18E have the same equivalent circuits. However, each power sourceline is formed by conductive films of different layers in the case ofarranging a power source line 3712 in column (FIG. 18C) and in the caseof arranging a power source line 3712 in rows (FIG. 18E). Here,attention is attracted to a wiring connected with the gate electrode ofthe driver TFT 3703. In order to show that these wirings are formed bydifferent layers, the pixels are illustrated by using two diagrams,FIGS. 18C and 18E.

The switching TFT 3701 operates in a linear region, whereas the driverTFT 3703 operates in a saturation region. Further, the driver TFT 3703serves to control the value of current flowing through thelight-emitting element 3705, whereas the TFT 3704 operates in thesaturation region and serves to control the supply of current to thelight-emitting element 3705.

The pixels illustrated in FIGS. 18D and 18F have the same pixelstructures as that illustrated in FIGS. 18C and 18E except the pointthat the erasing TFT 3706 and the scanning line 3715 are added to thepixels illustrated in FIGS. 18C and 18E.

The pixels illustrated in FIGS. 18A and 18B can operate CVCC. The pixelshaving operation structures illustrated in FIGS. 18C to 18E canappropriately change Vdd and Vss depending on the direction of currentflow of the light-emitting element like FIGS. 18A and 18B.

In the pixel having the foregoing structure, a slight change of avoltage between a gate electrode and a source region (Vgs) of the TFT3704 does not affect the current value of the light-emitting element3705 since the TFT 3704 operates in a linear region. That is, thecurrent value of the light-emitting element 3705 can be determineddepending on the driver TFT 3703 operating in a saturation region.According to the foregoing structure, a display device with an improvedimage quality can be provided by improving luminance irregularity of thelight-emitting element due to dispersion of TFT characteristics.

Especially in the case of forming a thin film transistor having anamorphous semiconductor or the like, it is preferably to increase thesemiconductor film area of the driver TFT since dispersion of the TFTcan be reduced. Therefore, the pixels illustrated in FIGS. 18A and 18Bcan increase aperture ratio since they have the small number of TFT.

The structure in which the capacitor 3702 is provided is explained. Thepresent invention is not limited thereto. The capacitor 3702 is notalways provided if gate capacitance can serve as retention volume for avideo signal.

In the case that the semiconductor region of the thin film transistor isformed by an amorphous semiconductor film, a circuit for correcting athreshold value in a pixel or the periphery of the pixel is preferablyformed since the threshold value tends to shift.

It is considered that such the active matrix light-emitting device hasadvantage to drive at low voltage since TFTs are provided to each pixelin the case of increasing pixel density. At the same time, a passivematrix light-emitting device in which TFTs are provided to row-by-rowcan be formed. The passive matrix light-emitting device has highaperture ratio since TFTs are not provided to each pixel.

In the display device according to the present invention, the drivingmethod of screen display is not especially limited, for example, a dotsequential driving method, a line sequential driving method, or a planesequential driving method may be used. Typically, a line sequentialdriving method is used and a time-division gradation driving method oran area gradation driving method may be appropriately used. A videosignal input to the source line of a display device may be either ananalog signal or a digital signal. A driver circuit and the like may beappropriately designed in accordance with the video signal.

As noted above, various pixel circuits can be adopted.

Example 8

In this example, as an example of a display module, an external view ofa light-emitting display module is explained with reference to FIGS. 19Aand 19B. FIG. 19A is a top view of a panel in which a first substrate1200 and a second substrate 1204 are sealed with a first sealant 1205and a second sealant, whereas FIG. 19B is a cross-sectional view of FIG.19A taken along line of A-A′.

In FIG. 19A, reference numeral 1201 represented by dotted line denotes asignal line (source line) driver circuit; 1202, a pixel portion; and1203, a scanning line (gate line) driver circuit. In this example, thesignal line driver circuit 1201, the pixel portion 1202, and thescanning line driver circuit 1203 present within the region that issealed with the first sealant 1205 and the second sealant. As the firstsealant 1205, epoxy resin having high viscosity including filler ispreferably used. As the second sealant, epoxy resin having low viscosityis preferably used. Further, the first sealant 1205 and the secondsealant preferably do not penetrate moisture or oxygen as much aspossible.

Drying agent may be provided between the pixel portion 1202 and thefirst sealant 1205. Further, the drying agent may be provided over thescanning line and the signal line in the pixel portion. As the dryingagent, a substance that adsorbs water (H₂O) by chemical adsorption, forexample, oxides of an alkaline earth metal such as calcium oxide (CaO)or barium oxide (BaO) is preferably used. Alternatively, a substancethat adsorbs water by physical adsorption such as zeolite or silica gelcan also be used.

The drying agent can be fixed to the second substrate 1204 in the stateof being contained as a granular substance in resin having high moisturepermeability. The following can be given as an example of the resinhaving high moisture permeability: acrylic resin such as ester acrylate,ether acrylate, ester urethane acrylate, ether urethane acrylate,butadiene urethane acrylate, special urethane acrylate, epoxy acrylate,amino resin acrylate or acrylic resin acrylate. In addition, epoxy resinsuch as bisphenol A type liquid resin, bisphenol A type solid resin,resin containing bromo-epoxy, bisphenol F type resin, bisphenol AD typeresin, phenol type resin, cresol type resin, novolac type resin, cyclicaliphatic epoxy resin, epi-bis type epoxy resin, glycidyl ester resin,glycidyl amine resin, heterocyclic epoxy resin, or modified epoxy resincan be used. Alternatively, other substances may be used. For example,an inorganic substance such as siloxane polymer may be used.

By providing the drying agent to the region that is overlapped with thescanning line, moisture penetrating into the display element anddeteriorations due to the moisture can be prevented without reducing anopening ratio.

Reference numeral 1210 denotes a connecting region for transmitting asignal that is input to the signal line driver circuit 1201 and thescanning line driver circuit 1203. The connecting regions 1210 receivesa video signal or a clock signal from an FPC (flexible printed circuit)1209 serving as an external input terminal via a connecting wiring 1208.

The cross-sectional structure is explained with reference to FIG. 19B.The pixel portion 1202 and the driver circuit are formed over the firstsubstrate 1200. The first substrate 1200 has a plurality ofsemiconductor elements as typified by a TFT. As the driver circuit, thesignal driver circuit 1201 is represented. A CMOS circuit that combinesan n-channel TFT 1221 and a p-channel TFT 1222 is formed in the signalline driver circuit 1201.

In this example, a signal line driver circuit 1201, a scanning linedriver circuit 1203, and a pixel portion 1202 are formed over onesubstrate. Accordingly, the capacity of a light-emitting display devicecan be reduced.

The pixel portion 1202 includes a switching TFT 1211, a driver TFT 1212,and a first pixel electrode 1213 formed by a conductive film havingreflectivity connected electrically to the drain of the driver TFT 1212.

An interlayer insulating film 1220 of the TFTs 1211, 1212, 1221, and1222 can be formed by a material containing an inorganic material(silicon oxide, silicon nitride, silicon oxynitride), organic material(polyimide, polyamide, polyimideamide, benzocyclobutene, siloxanepolymer) as its main component. In the case of using siloxane polymer asa raw material of the interlayer insulating film, the interlayerinsulating film is formed to be an insulating film, which has a skeletonstructure including silicon and oxygen, and which has hydrogen and/or analkyl group as a side-chain.

An insulator 1214 (also referred to as a bank) is formed at the edge ofthe first pixel electrode 1213. In order to improve the coverage of afilm formed over the insulator 1214, the insulator 1214 is formed tohave a curvature in its upper edge or lower edge. As a material for theinsulator 1214, a material containing an inorganic material (siliconoxide, silicon nitride, or silicon oxynitride), organic material(polyimide, polyamide, polyimideamide, benzocyclobutene, or siloxanepolymer) as its main component is used. In the case of using siloxanepolymer as a raw material of the insulator, the insulator is formed tobe an insulating film, which has a skeleton structure including siliconand oxygen, and which has hydrogen and/or an alkyl group as aside-chain. Further, the insulator 1214 may be covered by an aluminumnitride film, an aluminum nitride oxide film, a thin film containingcarbon as its main component, or a protective film formed by a siliconnitride film. By using an organic material dissolved or dispersed with amaterial that absorbs visible light such as a black pigment or dye forthe insulator, it is possible that a light-emitting element in whichstray light can be absorbed and contrast can be improved can be formedafterwards.

An organic compound material is deposited over the first pixel electrode1213 to form selectively a layer containing a light-emitting substance1215.

The layer containing the light-emitting substance 1215 can useappropriately the structure described in Example 5.

Accordingly, a light-emitting element 1217 composed of the first pixelelectrode 1213 the layer containing a light-emitting substance 1215, andthe second pixel electrode 1216 is formed. The light-emitting element1217 emits light to the side of the second substrate 1204.

A protective laminated layer 1218 for sealing the light-emitting element1217 is formed. The protective laminated layer 1218 is formed by alaminated layer composed of a first inorganic insulating film, a stressrelieving film, and a second inorganic insulating film. The protectivelaminated layer 1218 is adhered to the second substrate 1204 by thefirst sealant 1205 and the second sealant 1206. A polarized plate 1225is fixed to the second substrate 1204, and a retardation plate 1229 of½λ or ¼λ and an antireflection film 1226 are formed over the surface ofthe polarized plate 1225. Alternatively, the retardation plate 1229 of½λ or ¼λ may be formed over the second substrate 1204, and the polarizedplate 1225 may be formed over the retardation plate 1229.

The connecting wiring 1208 is electrically connected to an FPC 1209 byan anisotropic conductive film or an anisotropic conductive resin 1227.Moreover, a connecting portion of each of the wiring layers and each ofthe connecting terminals are preferably sealed by sealing resin. By thisstructure, moisture from the cross-section can be prevented frompenetrating into the light-emitting element to prevent deterioration ofthe light-emitting element.

The second substrate 1204 and the protective laminated layer 1218 canhave space therebetween filled with an inert gas, for example, a nitridegas. Accordingly, moisture and oxygen can be further prevented.

A coloring layer can be provided over the surface of the secondsubstrate 1204 or between the second substrate 1204 and the polarizedplate 1225. In this instance, full color display can be realized byproviding a light-emitting element capable of exhibiting white lightemission to the pixel portion and by providing a coloring layerexhibiting RGB over the second substrate 1204 or between the secondsubstrate 1204 and the polarized plate 1225. Alternatively, full colordisplay can be realized by providing a light-emitting element capable ofexhibiting blue emission and separately providing a color conversionlayer. Moreover, each of a pixel portion and a light-emitting elementexhibiting red, green, and blue emission are formed, and a coloringlayer can be used over the second substrate 1204 or between the secondsubstrate 1204 and the polarized plate 1225. Such a display module canhave high color purity of each RGB and display high-resolution images.

A light-emitting display module can be formed by using a substrate suchas a film or resin as either or both of the first substrate 1200 or thesecond substrate 1204. By sealing the light-emitting element withoutusing an opposing substrate as noted above, a display device can befurther reduced its weight, size, and thickness.

Any one of Embodiments 1 to 4 can be applied to this example. Alight-emitting display module is explained as a display module, but thedisplay module is not limited thereto. The present invention can beappropriately applied to a display module such as a liquid crystaldisplay module, a DMD (Digital Micromirror Device), a PDP (PlasmaDisplay Panel), an FED (Field Emission Display, and an electrophoreticdisplay device (electronic paper).

Example 9

In this example, a method for manufacturing a semiconductor devicehaving a laminated wirings structure is explained with reference to FIG.24.

As illustrated in FIG. 24, a base film 2202 is formed to blockimpurities from a substrate 2201 is formed over a substrate 2201.Thereafter, a semiconductor region formed by a semiconductor layerhaving a desired shape is formed, and a first insulating layer 2204serving as a gate insulating film and a first conductive layer servingas a gate electrode are deposited. Then, the first conductive layer isetched into a desired shape to form a gate electrode 2205. In thisinstance, a part of the first insulating layer 2204 is etched dependingon etching conditions, which leads to reduce a thickness of the firstinsulating layer 2204. Then, a second insulating layer 2206 may beformed by a silicon oxide film all over the substrate. By the secondinsulating layer, oxidization of the gate electrode can be prevented.And then, impurities are doped to the semiconductor region by using thegate electrode as a mask to form an impurity region, and heat treatment,strong light irradiation, or laser light irradiation is carried out inorder to activate impurities doped to the impurity region. By thisprocess, a source region and a drain region 2203 are formed. Thereafter,a first interlayer insulating layer 2207 is formed by coating organicresin over the first insulating layer 2206.

An opening portion is formed by etching a part of the first interlayerinsulating layer 2207, simultaneously, a part of the source region andthe drain region 2203 is exposed. Then, a second conductive layer isformed. And then, a source electrode and a drain electrode 2213 a and2213 b are formed by using the first conditions and the secondconditions described in Embodiment 1. The side faces of the sourceelectrode and the drain electrode 2213 a and 2213 b are formed to have acurved surface.

Organic resin is coated over the first interlayer insulating layer 2207and the source electrode and the drain electrode 2213 a and 2213 b andhardened to form a second interlayer insulating layer 2221. Then, a partof the second interlayer insulating layer 2221 is etched to expose apart of the source electrode and the drain electrode 2213 a and 2213 b.And then, a third conductive layer is formed all over the substrate tobe etched by using the first conditions and the second conditionsdescribed in Embodiment 1 to form first wirings 2222 a and 2222 bconnected to the source electrode and the drain electrode 2213 a and2213 b.

A multi-wire structure can be formed by forming a third interlayerinsulating layer 2223 and second wirings 2224 a and 2224 b.

Example 10

According to the present invention, a semiconductor device such as ahighly integrated semiconductor circuit composed of the integration ofsemiconductor elements, typically, a signal line driver circuit, acontroller, a CPU, a converter of a sound processing circuit, a powersource circuit, a sending and receiving circuit, a memory, or anamplifier of a sound processing circuit can be formed with high yieldsand high reliability. Moreover, a system on chip, which can be increasedits speed, improved its reliability, and reduced its power consumption,and which is monolithicly mounted with a circuit constituting a systemsuch as a memory or I/O interface can be formed with high yields andhigh reliability.

Example 11

Various electronic devices can be manufactured by incorporating thesemiconductor device described in the above examples into a housing.Examples of electronic devices can be given as follows: a televisionset, a camera such as a video camera or a digital camera, a goggle typedisplay (head mount display), a navigation system, an audio reproducingdevice (a car audio, an audio component, or the like), a personalcomputer, a game machine, a personal digital assistant (a mobilecomputer, a cellular phone, a portable game machine, an electronic book,or the like), an image reproducing device including a recording medium(specifically, a device that can reproduce a recording medium such as aDigital Versatile Disc (DVD) and has a display device that can displaythe image of the recording medium), or the like. As typical examples ofthe electronic devices, FIG. 20 and FIG. 21 illustrate the televisionset and a block diagram thereof, respectively. FIGS. 22A and 22Billustrate a digital camera.

FIG. 20 is a diagram showing a general structure of a television setthat receives analog television broadcasting. In FIG. 20, the airwavesfor television broadcasting received by an antenna 1101 are input into atuner 1102. The tuner 1102 generates and outputs intermediate frequency(IF) signals by mixing the high frequency television signals input fromthe antenna 1101 into locally-oscillating frequency signals that arecontrolled in accordance with the desired reception frequency.

The IF signals taken out by the tuner 1102 are amplified to the requiredvoltage by an intermediate frequency amplifier (IF amplifier) 1103.Thereafter the amplified IF signals are image detected by an imagedetection circuit 1104 and audio detected by an audio detection circuit1105. The image signals output from the image detection circuit 1104 aredivided into luminance signals and chrominance signals by an imageprocessing circuit 1106. Further, the luminance signals and thechrominance signals are subjected to the predetermined image signalprocessing to be image signals, so that the image signals are output toan image output portion 1108 of a display device that is a semiconductordevice of the present invention, typically, a liquid crystal displaydevice, a light-emitting display device, a DMD (Digital MicromirrorDevice), a PDP (Plasma Display Panel), an FED (Field Emission Display),an electrophoretic display device (an electronic paper) or the like.Note that a television that uses the liquid crystal display device asthe display device becomes a liquid crystal television, and a televisionthat uses the light-emitting display device as the display devicebecomes an EL television. The same is true in using another displaydevice.

The signals output from the audio detection circuit 1105 are subjectedto processing such as FM demodulation by an audio processing circuit1107 to be audio signals. The audio signals are then amplifiedappropriately to be output to an audio output portion 1109 such as aspeaker or the like.

The television set according to the invention may be a television thatis compatible with not only analog broadcastings such as terrestrialbroadcasting in a VHF band or a UHF band, cable broadcasting, and BSbroadcasting, but also digital broadcastings such as terrestrial digitalbroadcasting, cable digital broadcasting, and BS digital broadcasting.

FIG. 21 is a front perspective view of the television set, whichincludes a housing 1151, a display portion 1152, a speaker portion 1153,an operational portion 1154, a video input terminal 1155, and the like.The television set has a structure illustrated in FIG. 20.

The display portion 1152 is an example of the image output portion 1108illustrated in FIG. 20. The display portion displays images thereon.

The speaker portion 1153 is an example of the audio output portion 1109illustrated in FIG. 20. The speaker portion outputs audio therefrom.

The operational portion 1154 is provided with a power source switch, avolume switch, a channel select switch, a tuning switch, a selectionswitch, and the like to turn ON/OFF the television set, to selectimages, to control sound, to select a tuner, and the like, respectively,by holding the switches down. Note that the selections as mentionedabove can be performed also by a remote-control operation unit, thoughnot shown in the drawing.

The video input terminal 1155 inputs image signals into the televisionset from an external device such as a VTR, a DVD, or a game machine.

In the case of a wall-mounted television set, a portion for hanging onwalls is provided on the rear of the television set that is described inthis embodiment.

A television set can be manufactured at low cost with high throughputand high manufacturing yields by applying the display device that is anexample of a semiconductor device according to the invention to thedisplay portion of the television set. In addition, a television set canbe manufactured at low costs with high throughput and yields by applyinga semiconductor device according to the invention to a CPU forcontrolling an image detection circuit, an image processing circuit, anaudio detection circuit, and an audio processing circuit of a televisionset. Consequently, such the television can be used for various purposesparticularly as a large area display medium such as a wall-mountedtelevision set; information display boards in railway stations,airports, or the like; or advertisement display boards on the streets.

FIGS. 22A and 22B illustrate an example of a digital camera. FIG. 22A isa front view of the digital camera, whereas FIG. 22B is a rear viewthereof. In FIG. 22A, a digital camera is provided with a release button1301, a main switch 1302, a viewfinder window 1303, a flash 1304, a lens1305, a camera cone 1306, and a housing 1307.

In FIG. 22B, the digital camera is provided with a viewfinder eyepiece1311, a monitor 1312, and an operational button 1313.

When holding down half the release button 1301, a focus adjustmentmechanism and an exposure adjustment mechanism are operated. Whenholding down the release button completely, a shutter is released.

The digital camera is turned ON/OFF by holding down or rotating the mainswitch 1302.

The viewfinder window 1303 is disposed above the lens 1305 on the frontface of the digital camera. The viewfinder window 1303 is used to checka shooting range and a focusing point through the viewfinder eyepiece1311 that is illustrated in FIG. 22B.

The flash 1304 is disposed at the upper portion of the front face of thedigital camera body. When the luminance of an object is low, the releasebutton is held down to emit auxiliary light simultaneously withreleasing the shutter.

The lens 1305 is disposed on the front of the digital camera. The lensis composed of a focusing lens, a zoom lens, and the like. The lensconstitutes an optical shooting system together with a shutter and anaperture, each of which is not shown. An image sensing device such as aCCD (charge coupled device) is located in the region posterior to thelens.

The camera cone 1306 is used to move the position of the lens in orderto bring into focus the focusing lens, the zoom lens, or the like. Whentaking a picture, the lens 1305 is brought to the fore by bringing thecamera cone forward. When carrying the camera, the lens 1305 is storedinside the main body to make the camera be compact. The camera accordingto this example can take a picture in zooming by bringing the cameracone 1306 to the fore. However, it is not limited to this structure. Thedigital camera may have the structure in which an optical shootingsystem inside the casing 1307 enables the camera to take a picture inzooming without bringing the camera cone to the fore.

The viewfinder eyepiece 1311 is provided at the upper portion of therear of the digital camera whereby the shooting range and the focusingpoint are checked by sight.

The operational button 1313 is provided on the rear of the digitalcamera and composed of various kinds of operational functions such as asetup button, a menu button, a display button, a function button, and aselect button.

A digital camera can be manufactured at low costs with high throughputand high manufacturing yields by applying the display device that is oneexample of a semiconductor device according to the invention to amonitor A digital camera can be manufactured at low costs with highthroughput and high manufacturing yields by applying the semiconductordevice according to the invention to a CPU for processing in response toinput operation of various function buttons, a main switch, a releasebutton, and the like, a CPU for controlling various circuits such as acircuit for auto-focusing and auto-focusing adjustment, a timing controlcircuit for controlling electric flash drive and CCD drive, an imagingcircuit for generating an image signal from a signal that isphoto-electrically converted by an imaging device such as a CCD, an A/Dconverter circuit for converting an image signal generated in an imagingcircuit into a digital signal or a memory interface for writing andreading image data in a memory.

Although the present invention has been fully described by way ofexamples with reference to the accompanying drawings, it is to beunderstood that various changes and modifications will be apparent tothose skilled in the art. Therefore, unless otherwise such changes andmodifications depart from the scope of the present invention hereinafterdescribed, they should be construed as being included therein.

1. A method for manufacturing a wiring over a substrate comprising thesteps of: forming a first conductive layer over an insulating surface;forming a first mask pattern over the first conductive layer; forming asecond conductive layer having a side surface having an angle in a rangeof 85° to 90° with respect to a plane parallel to the insulating surfaceby etching the first conductive layer under a first etching condition;and forming a third conductive layer and a second mask pattern byetching the second conductive layer and the first mask pattern under asecond condition; wherein a second selective ratio under the secondcondition of the first mask pattern to the second conductive layer islarger than a first selective ratio under the first condition of thefirst mask pattern to the first conductive layer.
 2. A method formanufacturing a wiring over a substrate comprising the steps of: forminga first conductive layer over an insulating surface; forming a firstmask pattern over the first conductive layer; forming a secondconductive layer having a side surface having an angle in a range of 85°to 90° with respect to a plane parallel to the insulating surface byetching the first conductive layer under a first etching condition;oxidizing a surface of the second conductive layer; and forming a thirdconductive layer and a second mask pattern by etching the secondconductive layer and the first mask pattern under a second condition;wherein a second selective ratio under the second condition of the firstmask pattern to the second conductive layer is larger than a firstselective ratio under the first condition of the first mask pattern tothe first conductive layer.
 3. The method for manufacturing the wiringover the substrate according to any one of claims 1 and 2, wherein amixed gas composed of an etching gas used in the first condition and anetching gas that yields a higher selective ratio of the first maskpattern to the first conductive layer than that under the firstcondition is used under the second condition.
 4. The method formanufacturing the wiring over the substrate according to claim 3,wherein the etching gas used in the first condition is boron trichlorideor chlorine, and the etching gas that yields the higher selective ratioof the first mask pattern to the first conductive layer than that underthe first condition is one kind or a plurality of kinds selected fromthe group consisting of carbon tetrafluoride, sulfur fluoride, andoxygen.
 5. The method for manufacturing the wiring over the substrateaccording to any one of claims 1 and 2, wherein the first conductivelayer is a conductive layer containing aluminum.
 6. A method formanufacturing a semiconductor device comprising the steps of: forming afirst conductive layer over an insulating surface; forming a first maskpattern over the first conductive layer; forming a second conductivelayer having a side surface having an angle in a range of 85° to 90°with respect to a plane parallel to the insulating surface by etchingthe first conductive layer under a first etching condition; forming athird conductive layer and a second mask pattern by etching the secondconductive layer and the first mask pattern under a second condition;and forming an insulating layer by coating an insulating material afterremoving the second mask pattern; wherein a second selective ratio underthe second condition of the first mask pattern to the second conductivelayer is larger than a first selective ratio under the first conditionof the first mask pattern to the first conductive layer.
 7. A method formanufacturing a semiconductor device comprising the steps of: forming afirst conductive layer over an insulating surface; forming a first maskpattern over the first conductive layer; forming a second conductivelayer having a side surface having an angle in a range of 85° to 90°with respect to a plane parallel to the insulating surface by etchingthe first conductive layer under a first etching condition; oxidizing asurface of the second conductive layer; forming a third conductive layerand a second mask pattern by etching the second conductive layer and thefirst mask pattern under a second condition; and forming an insulatinglayer by coating an insulating material after removing the second maskpattern; wherein a second selective ratio under the second condition ofthe first mask pattern to the second conductive layer is larger than afirst selective ratio under the first condition of the first maskpattern to first conductive layer.
 8. The method for manufacturing thesemiconductor device according to any one of claims 6 and 7, wherein amixed gas composed of an etching gas used in the first condition and anetching gas that yields a higher selective ratio of the first maskpattern to the first conductive layer than that under the firstcondition is used under the second condition.
 9. The method formanufacturing the semiconductor device according to claim 8, wherein theetching gas used in the first condition is boron trichloride orchlorine, and the etching gas that yields a higher selective ratio ofthe first mask pattern to the first conductive layer than that under thefirst condition is one or a plurality of kinds selected from the groupconsisting of carbon tetrafluoride, sulfur fluoride, and oxygen.
 10. Themethod for manufacturing the semiconductor device according to any oneof claims 6 and 7, wherein the first conductive layer is a conductivelayer containing aluminum.
 11. A wiring over a substrate comprising: awiring formed over an insulating surface; wherein a side surface of thewiring has a plurality of inclined planes, a first inclined plane has anangle in a range of 50° to 70° with respect to the insulating surface, asecond inclined plane has an angle in a range of 20° to 60° with respectto the insulating surface, and the first inclined plane is in contactwith the insulating surface.
 12. The wiring over the substrate accordingto claim 11, wherein a region formed by crossing the first inclinedplane and the second inclined plane is a side surface of a layer madefrom a material that is used for forming the wiring.
 13. A wiringsubstrate comprising: a wiring formed over an insulating surface;wherein a side surface of the wiring has a curved face.
 14. Asemiconductor device comprising: a wiring formed over an insulatingsurface; and an insulating layer having a flat surface over the wiring;wherein a side surface of the wiring has a plurality of inclined planes,a first inclined plane has an angle in a range of 50° to 70° withrespect to the insulating surface, a second inclined plane has an anglein a range of 20° to 60° with respect to the insulating surface, and thefirst inclined plane is in contact with the insulating surface.
 15. Thesemiconductor device according to claim 14, wherein a region formed bycrossing the first inclined plane and the second inclined plane is aside surface of a layer made from a material that is used for formingthe wiring.
 16. The semiconductor device comprising: a wiring formedover an insulating surface; and an insulating layer having a flatsurface over the wiring; wherein a side surface of the wiring has acurved face.
 17. The semiconductor device according to claim 14 or 16,wherein the insulating layer having a flat surface is formed by coatingorganic resin or siloxane polymer.